Installation Report

DVIA-M Series

11-26-2025

Gedeon Richter JEOL JSM-IT500HR DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

JEOL

JSM-IT500HR

SEM

Gedeon Richter

DVIA-ML1000

Overview

Gedeon Richter — JEOL JSM-IT500HR SEM on DVIA-ML1000 (SN 250829R1), 1st tuning; equipment on/IDLE.

Engineers: Chaewon Lee, Jonghwa Suh.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial number: 250829R1

Engineer

Chaewon Lee, Jonghwa Suh — DAEIL SYSTEMS

Tuning date

November 26, 2025

Report written date

December 1, 2025

Installation site

Gedeon Richter laboratory

Equipment

Manufacturer: JEOL

Type: SEM

Model: JSM-IT500HR

Equipment status

The microscope is installed on the DVIA-ML1000 platform. Turned on / IDLE.

Number of tuning trial

1st

Measurement device

8.1) Data Physics DAQ: QUATTRO, SN 22436, SignalCalc ACE

8.2) Accelerometer: PCB 393B05

Measurement setup

Bandwidth: 625 Hz — Lines: 3200 — Spectrum averaging — Engineering units: m/s — Window: Hanning — Overlap: Max

Vibration specification

Builder limitations: ≤3.1 μm/s at ≥5 Hz (no separate tool-specific table; see measurement summary below).

Conclusion

After installation of the DVIA-ML1000, floor vibration was reduced to within the vibration specification in all axes.

Builder limitations

≤3.1 μm/s at ≥5 Hz

Measurement summary

Location	Point	State	Axis	Measurement (floor)	Measurement (on DVIA-ML1000)	Result (floor)	Result (on platform)
Gedeon Richter laboratory	1. Floor / 2. DVIA-ML1000	Equipment on/IDLE	Vertical	VC-C @ 25 Hz	VC-G @ 25 Hz	✗ FAIL	✓ PASS
			L–R	VC-E @ 10 Hz	VC-G @ 10 Hz	✗ FAIL	✓ PASS
			F–B	VC-E @ 10 Hz	VC-G @ 10 Hz	✓ PASS	✓ PASS

Data and Image

For each axis (Vertical, Left–Right, Front–Back): VC Curves, Autospectrum, Transmissibility

Vertical VC Curves

Vertical Narrow Band

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrow Band

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrow Band

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

FIBERHOME JEOL JSM-IT500 DVIA-MB1000 Installation Report — onsite measurement (SN 190423R1, 2019-12-03)

12-05-2019Read more