Installation Report

DVIA-M Series

12-17-2025

Safran JEOL JSM-IT800 DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

Safran

JEOL

JSM-IT800

SEM

DVIA-ML1000

Report header

Customer: Safran — Tuning: 2025-12-17 — Report written: 2025-12-17

1. Vibration Isolation System Info

Model: DVIA-ML1000 — Serial: 250829R2

2. Engineer

Chaewon Lee, Kyongdan Kim

3. Tuning date

December 17, 2025

4. Installation site

Safran Transmission System LAB, 18 Bd Louis Seguin, 92700 Colombes, France

5. Equipment

Manufacturer: JEOL — SEM — Model: JSM-IT800

6. Equipment status

The equipment is installed on the DVIA-ML1000; on/IDLE

7. Number of tuning trial

1st

8. Measurement device

Data Physics DAQ: QUATTRO (SN 22436), SignalCalc ACE

Accelerometer: PCB 393B05

9. Measurement setup

Bandwidth 625 Hz, Lines 3200, Spectrum averaging, Engineering units: m/s, Window Hanning, Overlap Max

10. Vibration specification

No separate numerical table; evaluation follows the written conclusion and the measurement summary.

11. Conclusion

The DVIA-ML1000 satisfies the vibration specification in all directions.

In certain high-frequency ranges, on-plateau levels can exceed the floor because vibration is originated by the tool; the table still isolates floor-borne motion, but it cannot remove all instrument-generated motion on the top plate.

12. Measurement summary

Location	State	Direction	Measured (floor)	Measured (DVIA-ML1000)	Result (floor)	Result (on platform)
Safran Transmission System LAB	on/IDLE	Vertical	VC-C @ 12.5 Hz	VC-G @ 12.5 Hz	✓ PASS	✓ PASS
		L–R	VC-E @ 10 Hz	VC-G @ 10 Hz	✓ PASS	✓ PASS
		F–B	VC-F @ 100 Hz	VC-G @ 100 Hz	✓ PASS	✓ PASS

13. Data & image

Vertical, L–R, F–B — VC Curves, Autospectrum, Transmissibility

Vertical VC Curves

Vertical Narrow Band

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrow Band

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrow Band

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A