Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
HITACHI TEM HT7800 DVIA-M1000 (241202R7) Installation Report
DVIA-M1000 installation report (serial 241202R7). Published figures: tuning-request, vertical-transmissibility, left-to-right-transmissibility, front-to-back-transmissibility, equipment-picture-01. Reference uses the standard Generic Vibration Criteria markdown table.
Jeonbuk National University Raith Voyager DVIA-ML3000 Installation Report
DVIA-ML3000 installation report at Jeonbuk National University with Raith Voyager electron beam lithography. Published graphics include vibration specification capture, VC/autospectrum/transmissibility plots per axis, and equipment photo.
Hitachi FE-SEM SU8700 DVIA-M1000 (241106R7) Installation Report
DVIA-M1000 installation report (serial 241106R7) — Hitachi FE-SEM SU8700. Field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.
Hitachi FE-SEM SU8700 DVIA-M1000 (241106R8) Installation Report
DVIA-M1000 installation report (serial 241106R8) — Hitachi FE-SEM SU8700. Field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.
Tier-1 Semiconductor Cheongju M11 ZEISS X-ray Microscope Xradia 630 Versa DVIA-ML3000 (250225R2) Installation Report
DVIA-ML3000 installation report (serial 250225R2) for ZEISS X-ray Microscope Xradia 630 Versa at Tier-1 Semiconductor Cheongju 3 Campus M11. March 31, 2025 tuning and vibration measurement; report written April 1, 2025. Equipment condition 장비 Turned on/IDLE. Manufacturer vibration limits via specification capture; VC / Autospectrum / Transmissibility plots by axis. Conclusion notes all axes meet specification and attributes somewhat lower measured high-frequency performance to internal motor-related vibration influences. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).
CIQTEK FIB-SEM DB550 DVIA-M1000 (240828R1-4) Installation Report
DVIA-M1000 installation report (serial 240828R1-4) — CIQTEK FIB-SEM DB550. Field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.