Tier-1 Semiconductor Cheongju M11 ZEISS X-ray Microscope Xradia 630 Versa DVIA-ML3000 (250225R2) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Tier-1 Semiconductor Cheongju 3 Campus M11 2nd floor research laboratory.
Tuning and vibration measurement were conducted with 장비 Turned on/IDLE.
Data are presented as VC Curves, and reference information on vibration levels is provided.
Vibration Isolation System Info
Model: DVIA-ML3000
Serial Number: 250225R2
Engineer
Chaewon Lee — DAEIL SYSTEMS field engineer
Tuning Date
March 31, 2025
Report written date
April 1, 2025
End User
Tier-1 Semiconductor
Installation Site
Tier-1 Semiconductor Cheongju 3 Campus M11 2nd floor research laboratory
Equipment Condition
장비 Turned on/IDLE
Customer Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Xradia 630 Versa
Measuring Equipment
9.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Equipment Vibration Specification
Conclusion
All directions satisfy the vibration specification.
However, the somewhat lower measured high-frequency performance in each axis is presumed to be due to vibration influences from equipment internal motor operation.
Measurement Data
| Measurement Point | Status | Axis | Vibration specification | Floor | DVIA-ML3000 | Result | Result |
|---|---|---|---|---|---|---|---|
| Tier-1 Semiconductor Cheongju 3 Campus M11 2nd floor research laboratory 1. Floor 2. DVIA-ML3000 | 장비 Turned on/IDLE | Vertical | VC-C | VC-D @ 20 Hz | VC-G @ 20 Hz | ✓ PASS | ✓ PASS |
| Left to Right | N/A | VC-E @ 16 Hz | VC-G @ 16 Hz | ✓ PASS | ✓ PASS | ||
| Front to Back | N/A | VC-D @ 1 Hz | VC-F @ 1 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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