Tier-1 Semiconductor Giheung ZEISS Xradia 520 Versa DVIA-ML3000 (260319R2) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory.
Equipment installed and inspection and vibration measurement were performed with the equipment Turned on.
Data are presented as VC curves with reference information on vibration levels.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 260319R2
Engineer
Donggyu Park · DAEIL SYSTEMS
Tuning Date
2026.07.03
Report Written Date
2026.07.14
Installation Site
Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory
End User
Tier-1 Semiconductor
Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Xradia 520 Versa
Equipment Specification
VC-C
Equipment Status
Equipment installed and Turned on
Measuring Equipment
10.1) Measurement Equipment
Hardware: B&K Front End Type 3040-A-040
Software: B&K Pulse Labshop22 Version
10.2) Accelerometer
PCB 393B05
Measurement Setup
F Span: 200 Hz
Lines: 2400
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Conclusion
The vibration specification is satisfied in all X, Y, and Z axes.
There was some airflow from the ventilation outlet behind the right rear of the isolation platform, but it was judged to have no significant effect on the platform and no issue is expected for future equipment operation.
Measurement Data
| Measurement site | Vibration spec | Axis | Floor | DVIA-ML3000 |
|---|---|---|---|---|
| 1. Floor 2. DVIA-ML3000 | Refer to Section 8 | Vertical (Z-axis) | ✗ FAIL | ✓ PASS |
| Left to Right (X-axis) | ✓ PASS | ✓ PASS | ||
| Front to Back (Y-axis) | ✓ PASS | ✓ PASS |
Data and Image
Z-axis — VC Curves
Z-axis — Autospectrum
X-axis — VC Curves
X-axis — Autospectrum
Y-axis — VC Curves
Y-axis — Autospectrum
Reference
The table below classifies vibration levels per IEST-RP-CC012.2.
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle (cell) size in medical and pharmaceutical research.
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