Tier-1 Semiconductor Hwaseong ZEISS Xradia 730 Versa DVIA-ML3000 (251107R2) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Tier-1 Semiconductor Hwaseong campus 12/13 line, 4F laboratory.
Equipment was Turned on/IDLE during tuning and vibration measurement.
Data are presented as VC curves with reference information on vibration levels.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 251107R2
Engineer
Chaewon Lee — DAEIL SYSTEMS
Tuning Date
March 30, 2026
Report Written Date
April 3, 2026
Installation Site
Tier-1 Semiconductor Hwaseong campus 12/13 line, 4F laboratory
End User
Tier-1 Semiconductor
Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Xradia 730 Versa
Equipment Specification
VC-C
Equipment Condition
Equipment installed and Turned on/IDLE
Measuring Equipment
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Conclusion
The vibration specification is satisfied in all directions.
Measurement Data
| Measurement site | Status | Specification | Axis | Measurement data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Tier-1 Semiconductor Hwaseong campus 12/13 line, 4F laboratory 1. Floor vibration 2. DVIA-ML3000 | Turned on/IDLE | VC-C | Vertical | Operating Theatre @ 8 Hz | VC-D @ 8 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C @ 4 Hz | VC-F @ 4 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-C @ 2.5 Hz | VC-F @ 2.5 Hz | ✓ PASS | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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