Tier-1 Semiconductor Icheon ZEISS Xradia 730 Versa DVIA-ML3000 (250903R5) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at Tier-1 Semiconductor Icheon campus P&T1.
Tuning and vibration measurement were performed with the customer equipment Turned off.
Data are presented as VC curves with reference information on vibration levels.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 250903R5
Engineer
Jeong Sungyun — DAEIL SYSTEMS Development Team
Tuning Date
December 18, 2025
Report Written Date
December 22, 2025
Installation Site
Tier-1 Semiconductor Icheon campus P&T1
End User
Tier-1 Semiconductor
Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Versa 730
Equipment Specification
Equipment Condition
Equipment installed and Turned Off
Measuring Equipment
10.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Conclusion
All directions satisfy the specification. High-frequency floor vibration near 30 Hz is at ISO grade; after tuning it was confirmed to meet the specification at VC-C or below.
It was confirmed that the customer equipment operates normally during X-ray imaging.
Measurement Data
| Measurement site | Status | Specification | Axis | Measurement data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| Tier-1 Semiconductor Icheon campus P&T1 1. Floor vibration 2. DVIA-ML3000 | Equipment installed and Turned Off | VC-C | Vertical | ISO @ 31.5 Hz | VC-C @ 31.5 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-B @ 31.5 Hz | VC-C @ 31.5 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-B @ 31.5 Hz | VC-E @ 31.5 Hz | ✗ FAIL | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
*Notes:*
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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