POSTECH Raith Voyager Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML3000 installed at the Nano Convergence Technology Institute of POSTECH.
Tuning and vibration measurement were conducted with the equipment turned off.
Construction was in progress nearby at the time of the work. This may affect vibration measurement results.
Data are presented as VC curves, and reference information on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-ML3000
Serial Number: 250103R2-2
Engineer
Chaewon Lee and Jonghwa Suh, DAEIL SYSTEMS field engineers
Measurement Date
February 28, 2025
Report Written Date
March 4, 2025
End User
POSTECH
Installation Site
Room 216, Nano Convergence Technology Institute, POSTECH
Equipment Status
Equipment installed / Turned off
Customer Equipment
Manufacturer: Raith
Equipment: Electron Beam Lithography system
Model: Voyager
Vibration Measurement Equipment
9.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Accelerometer
PCB accelerometer
Model: 393B05
Vibration Measurement Setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Equipment Vibration Specification
Conclusion
Vertical: A specification exceedance occurred at 100 Hz. Construction was underway nearby during the measurement, and vibration is presumed to have propagated along cables connected to the equipment.
Left to Right and Front to Back: The specification is met in all frequency bands.
Measurement Data
| Measurement site | State | Vibration specification (µm/s) | Axis | Measurement data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor | DVIA-ML3000 | Floor | DVIA-ML3000 | ||||
| POSTECH Nano Convergence Technology Institute, Room 216 1. Floor 2. DVIA-ML3000 | Equipment installed / Turned off | 1.6–16 Hz: ≤ 0.8 16 Hz and above: ≤ 1.0 | Vertical | VC-D @ 100 Hz | VC-E @ 100 Hz | ✗ FAIL | ✗ FAIL |
| Left to Right | VC-C @ 10 Hz | VC-G @ 10 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-C @ 16 Hz | VC-G @ 16 Hz | ✗ FAIL | ✓ PASS | |||
Data and Image
Vertical VC Curves
Vertical Auto Spectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Auto Spectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Auto Spectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC·A and VC·B) or 1 to 80 Hz (VC·C through VC·G).
- The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
