Installation Report

DVIA-M Series

02-24-2025

Tier-1 Semiconductor Onyang ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (240726R3) Installation Report

DVIA-M Series

Installation Report

Tier-1 Semiconductor

Onyang

ZEISS

Crossbeam 550

FIB-SEM

DVIA-M1000

DVIA-ML1000

240726R3

Overview

Tuning and vibration measurement were performed for the DVIA-M1000 installed at the Tier-1 Semiconductor Onyang campus.

Tuning and vibration measurement were conducted with the equipment in the Turned off state.

Measurement data are presented as VC curves, and reference materials are provided for vibration levels.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 240726R3

Engineer

Chaewon Lee and Jonghwa Seo from DAEIL SYSTEMS

Date of Measurement

February 12, 2025

Tuning Date

N/A

Report written date

February 24, 2025

Number of Tuning Trial

N/A

End User

Tier-1 Semiconductor

Installation Site

Onyang, South Korea — Line 4 research laboratory

Equipment Condition

장비 설치 및 Turned off

Equipment

Manufacturer: ZEISS

Equipment: FIB-SEM

Model: Crossbeam 550

Measuring Equipment

9.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

9.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Vibration specification

Conclusion

The measured data satisfies the vibration specification in all directions.

Measurement Summary

Place of Measurement	Status	Direction	Floor	DVIA-M1000
Tier-1 Semiconductor Onyang Line 4 research laboratory 1. Floor 2. DVIA-M1000	장비 설치 및 Turned off	Vertical	VC-C @ 12.5 Hz	VC-G @ 12.5 Hz
		Left to Right	VC-D @ 20 Hz	VC-G @ 20 Hz
		Front to Back	VC-D @ 1 Hz	VC-F @ 1 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A