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Installation Report
DVIA-M Series
11-03-2025

DVIA-ML1000 (241016R7) Installation Report

DVIA-M Series
Installation Report
ZEISS
FIB-SEM
Crossbeam 550
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000
241016R7

Contents

Overview

N/A

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 241016R7

Engineer

이채원

Tuning Date

25.10.20

Report written date

25.11.03

End User

삼성전자 DSR

Number of Tuning Trial

N/A

Location

N/A

Equipment

Manufacturer: N/A

Equipment: N/A

Model: DVIA-ML1000

Vibration Specification

Equipment Condition

N/A

Measurement Summary

측정 장소상태방향측정값결과
바닥진동DVIA-ML1000바닥진동DVIA-ML1000
삼성전자 DSR A동 연구타워 지하 2층 클린룸
1. 바닥진동
2. DVIA-ML1000		Turned on/IDLEVerticalVC-G @ 1 HzVC-G @ 1 Hz✓ PASS✓ PASS
Left to RightVC-E @ 1 HzVC-G @ 1 Hz✓ PASS✓ PASS
Front to BackVC-E @ 2 HzVC-G @ 2 Hz✓ PASS✓ PASS

Data and Image

Vertical VC Curves

Vertical VC Curves

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-03-2025
Tags
DVIA-M Series
Installation Report
ZEISS
FIB-SEM
Crossbeam 550
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000
241016R7

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