Installation Report

DVIA-M Series

12-09-2024

Tier-1 Semiconductor Cheonan C5 ZEISS Crossbeam 550 FIB-SEM DVIA-ML1000 (240710R2) Installation Report

DVIA-M Series

Installation Report

Tier-1 Semiconductor

Cheonan

ZEISS

FIB-SEM

Crossbeam 550

DVIA-ML1000

240710R2

Overview

Tuning and vibration measurements were performed for the DVIA-ML1000 installed at Tier-1 Semiconductor Cheonan site. After the tool was placed, vibration measurement and tuning were carried out with the equipment in IDLE state. Data are presented as VC curves, and reference information on vibration levels is provided.

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 240710R2

Engineer

Chaewon Lee — DAEIL SYSTEMS field engineer

Tuning Date

December 6, 2024

Report written date

December 9, 2024

End User

Tier-1 Semiconductor Cheonan site

Number of Tuning Trial

N/A

Location

Tier-1 Semiconductor Cheonan site, Building C5

Equipment

Manufacturer: ZEISS

Equipment: FIB-SEM

Model: Crossbeam 550

Measurement Device

Data Physics DAQ — Hardware: QUATTRO, Serial Number: 22436; Software: SignalCalc ACE

Accelerometer — PCB, Model: 393B05

Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Vibration Specification

Equipment Condition

Equipment installed/IDLE

Conclusion

All directions satisfy the equipment vibration specification.

Measurement Summary

Measurement Point	Status	Axis	Vibration specification	Floor	DVIA-ML1000	Result	Result
Tier-1 Semiconductor Cheonan C5 1. Floor 2. DVIA-ML1000	Equipment installed/IDLE	Vertical	VC-E	VC-D @ 10 Hz	VC-G @ 10 Hz	✗ FAIL	✓ PASS
Tier-1 Semiconductor Cheonan C5 1. Floor 2. DVIA-ML1000	Equipment installed/IDLE	Left to Right	VC-F	VC-F @ 3.15 Hz	VC-G @ 3.15 Hz	✓ PASS	✓ PASS
Tier-1 Semiconductor Cheonan C5 1. Floor 2. DVIA-ML1000	Equipment installed/IDLE	Front to Back	VC-F	VC-F @ 4 Hz	VC-G @ 4 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A