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Installation Report
DVIA-M Series
02-05-2025

DVIA-ML1000S (241008R1) Installation Report

DVIA-M Series
Installation Report
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000S
241008R1

Contents

Overview

N/A

Vibration Isolation System Information

Model: DVIA-ML1000S

Serial Number: 241008R1

Engineer

이채원, 서종화

Tuning Date

25.02.04

Report written date

25.02.05

End User

삼성디스플레이 기흥

Number of Tuning Trial

N/A

Location

N/A

Equipment

Manufacturer: N/A

Equipment: N/A

Model: DVIA-ML1000S

Equipment Condition

모든 장비 on/off

Measurement Summary

측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동All turned onVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-F @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동All turned offVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동Only Z motor Turned onVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @ 25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS
측정 장소상태장비 스펙방향측정값결과
FrameLidESCStageFrameLid
디에이치 연구동Only Z motor Turned offVC-DVerticalVC-D @10 HzVC-G @10 HzVC-G @10 HzVC-G @10 Hz✓ PASS
Left to RightVC-D @25 HzVC-G @25 HzVC-G @25 HzVC-G @25 Hz✓ PASS✓ PASS
Front to BackVC-D @20 HzVC-G @20 HzVC-G @20 HzVC-G @20 Hz✓ PASS✓ PASS

Data and Image

All turned on - Lid - Vertical VC Curves

All turned on - Lid - Vertical VC Curves

All turned on - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

All turned off - Lid - Vertical VC Curves

All turned off - Lid - Vertical VC Curves

All turned off - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

Only Z motor turned on - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

Only Z motor turned off - Lid - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Vertical Transmissibility

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Esc - Vertical VC Curves

State - Location - Vertical Autospectrum

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Autospectrum

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Stage - Vertical VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right VC Curves

State - Location - Left to Right Transmissibility

State - Location - Left to Right Transmissibility

State - Location - Front to Back VC Curves

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date02-05-2025
Tags
DVIA-M Series
Installation Report
Tier-1 Semiconductor
Semiconductor
DVIA-ML1000S
241008R1

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