Tier-1 Semiconductor DSR ZEISS GeminiSEM 460 DVIA-MB1000 (231123R6) Installation Report
Contents
Overview
After installing the DVIA-MB1000 at Tier-1 Semiconductor DSR, tuning and vibration measurements were carried out.
The DVIA-MB1000 was connected to a laptop; feedback and feed-forward tuning were performed through the UI software, and vibration measurements were carried out using Data Physics equipment for performance verification.
On-site restrictions made measurement data export impractical; therefore measurement waveform and spectrum plots are not included in this public summary. The manufacturer vibration specification figures appear under Equipment vibration specification below.
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 231123R6
Engineer
Chaewon Lee — DAEIL SYSTEMS
Tuning Date
June 12, 2024
Report written date
24.06.
Customer
Tier-1 Semiconductor DSR
Installation site
Tier-1 Semiconductor DSR Building A, B3 laboratory
Equipment
ZEISS GeminiSEM 460
Equipment vibration specification
Manufacturer vibration limits table
Vertical SPEC
Horizontal SPEC
Equipment Condition
Equipment is installed and operating.
Number of Tuning Trial
1st
Measuring Equipment
10.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
Vertical: On the floor, vibration at VC-F is measured at 1 Hz and 1.25 Hz. In the remaining bands, VC-G is measured. On the DVIA-MB1000, VC-G is measured in all bands.
Left to Right: On the floor, vibration at VC-F is measured at 1 Hz. In the remaining bands, VC-G is measured. On the DVIA-MB1000, VC-G is measured in all bands.
Front to Back: On the floor, vibration at VC-F is measured at 1 Hz. In the remaining bands, VC-G is measured. On the DVIA-MB1000, VC-G is measured in all bands.
Effective isolation is achieved across all bands.
All directions satisfy the equipment vibration specification.
Reference
Generic Vibration Criteria
Notes:
1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
2. Detail size refers to width in microelectronics fabrication or particle size in medical research.
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