Tier-1 Semiconductor ZEISS FE-SEM GeminiSEM 560 DVIA-MB1000 (231204R8) Installation Report
Contents
Overview
삼성전자 화성캠퍼스 12L 4층 연구소 분석실에 DVIA-MB1000 설치 튜닝 및 진동측정
DVIA-MB1000을 PC와 연결하여 UI Program을 통한 설치 튜닝, 진동측정 장비를 이용한 점검 진행했습니다.
Equipment Idle 상태에서 설치 튜닝 및 진동을 측정했습니다.
System Information
Model: DVIA-MB1000
Serial Number: 231204R8
Engineer
Jongwon Park from DAEIL SYSTEMS
Installation Date
February 22, 2024
Report written date
March 7, 2024
Prepared for
Tier-1 Semiconductor
Location
Tier-1 Semiconductor Hwaseong campus 12L, Hwaseong
Equipment
ZEISS FE-SEM GeminiSEM 560
Number of Tuning Trial
1회차
Equipment Condition
Equipment is installed / Idle
Measurement Device
9.1) Data Physics FFT Analyser
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Measurement Setting
Bandwidth: 1 - 80Hz
Lines: 800
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
9.3) Accelerometer
PCB Accelerometer
Model: 393B05
9.4) Measurement Method
상부(Top plate), 하부(Floor)에 진동 측정용 가속도 센서를 부착합니다.
Vertical, Left to Right, Front to Back 방향으로 진동을 측정합니다.
측정 Data를 VC Curve Graph에 표기하였습니다.
Conclusion
In the vertical direction, floor vibration was VC-B; on the DVIA-MB1000 it was attenuated to VC-F.
In the left-to-right and front-to-back directions, floor vibration was attenuated to VC-G.
Across vertical, left-to-right, and front-to-back directions, floor vibration exceeded the allowable range of the equipment vibration specification; on the DVIA-MB1000 the equipment vibration specification is met at all frequency bands.
Summary of Vibration Results
| Measurement Point | Floor | DVIA-MB1000 | Equipment Spec |
|---|---|---|---|
| Vertical 1-10 Hz | B(✗ fail) | F(✓ pass) | D |
| Vertical 12.5-80 Hz | B(✗ fail) | F(✓ pass) | B |
| Left to Right 1-10 Hz | C(✗ fail) | G(✓ pass) | D |
| Left to Right 12.5-80 Hz | D(✓ pass) | G(✓ pass) | B |
| Front to Back 1-10 Hz | C(✗ fail) | G(✓ pass) | D |
| Front to Back 12.5-80 Hz | E(✓ pass) | G(✓ pass) | B |
GeminiSEM560 Allowable Vibration Spec
GeminiSEM560 Allowable Vertical Vibration Spec VC curve Graph
GeminiSEM560 Allowable Horizontal Vibration Spec VC curve Graph
Data and Image
UI Program Transmissibility
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
12.2 Vibration Measurement
Vertical VC Curve (rms Velocity, m/s)
At 6.25 Hz, where ground vibration peaked, VC-B (2.06E-05) was measured, exceeding the equipment vibration allowance; on the DVIA-MB1000 it attenuates to VC-G (4.52E-07). The DVIA-MB1000 meets the equipment vibration specification at all frequency bands.
Left to Right VC Curve (rms Velocity, m/s)
At 3.25 Hz, where ground vibration peaked, VC-C (1.05E-05) was measured, exceeding the equipment vibration allowance; on the DVIA-MB1000 it attenuates to VC-G (6.35E-07). The DVIA-MB1000 meets the equipment vibration specification at all frequency bands.
Front to Back VC Curve (rms Velocity, m/s)
At 2.5 Hz, where ground vibration peaked, VC-C (8.80E-06) was measured, exceeding the equipment vibration allowance; on the DVIA-MB1000 it attenuates to VC-G (4.23E-07). The DVIA-MB1000 meets the equipment vibration specification at all frequency bands.
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
Share this Case Study
Case Study Information
Related Case Studies
Tier-1 Semiconductor Hwaseong ZEISS GeminiSEM 460 DVIA-MB1000 (230110R2) Installation Report
YIMO ZEISS GeminiSEM 560 FE-SEM DVIA-MB1000 (250714R3) Installation Report
