Tier-1 Semiconductor ZEISS FE-SEM GeminiSEM 560 DVIA-ML1000 (240925R4) Installation Report
Contents
Overview
Tuning and vibration measurement were performed for the DVIA-ML1000 installed at the Tier-1 customer's DSR site.
After equipment installation, vibration measurement and tuning were conducted with the equipment in the IDLE state.
When buses passed the building, building-wide vibration occurred. All data presented below were measured while buses were passing.
Data are presented as VC curves, and reference material on vibration levels is provided.
Vibration Isolation System Info
Model: DVIA-ML1000
Serial Number: 240925R4
Engineer
Chaewon Lee, Field Engineer, DAEIL SYSTEMS; Donghwan Kim, Domestic Sales, DAEIL SYSTEMS
Tuning Date
October 28, 2024
Report written date
November 4, 2024
End User
Tier-1 Semiconductor
Number of Tuning Trial
N/A
Location
Tier-1 fab, DSR site — Building A research tower B1
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: GeminiSEM 560
Equipment Status
Equipment installed and IDLE
Measurement Device
8.1) Data Physics DAQ
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration specification
N/A
Vibration measurement setup
Bandwidth: 200 Hz
Lines: 3200
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Tuning Request
N/A
Conclusion
Active
All directions and all frequency bands meet the vibration specification.
Passive
Spec out occurs in some frequency bands. This is a natural phenomenon when active isolation is not applied.
Turned off
Spec out occurs in some frequency bands.
Measurement Summary
Active isolator
| Measurement location | Status | Direction | Floor vibration | DVIA-ML1000 | Floor result | Platform result |
|---|---|---|---|---|---|---|
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Active | Vertical | VC-A @ 10 Hz | VC-E @ 10 Hz | ✗ FAIL | ✓ PASS |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Active | Left to Right | VC-E @ 12.5 Hz | VC-G @ 12.5 Hz | ✓ PASS | ✓ PASS |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Active | Front to Back | VC-D @ 10 Hz | VC-G @ 10 Hz | ✓ PASS | ✓ PASS |
Passive isolator
| Measurement location | Status | Direction | Floor vibration | DVIA-ML1000 | Floor result | Platform result |
|---|---|---|---|---|---|---|
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator ✓ Passive | Vertical | VC-A @ 10 Hz | VC-B @ 10 Hz | ✗ FAIL | ✗ FAIL |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator ✓ Passive | Left to Right | VC-E @ 80 Hz | VC-G @ 80 Hz | ✓ PASS | ✓ PASS |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator ✓ Passive | Front to Back | VC-F @ 80 Hz | VC-G @ 80 Hz | ✓ PASS | ✓ PASS |
Turned off isolator
| Measurement location | Status | Direction | Floor vibration | DVIA-ML1000 | Floor result | Platform result |
|---|---|---|---|---|---|---|
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Turned off | Vertical | Operating Theatre @ 10 Hz | Operating Theatre @ 10 Hz | ✗ FAIL | ✗ FAIL |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Turned off | Left to Right | VC-E @ 80 Hz | VC-D @ 80 Hz | ✓ PASS | ✓ PASS |
| Tier-1 fab, DSR site (Building A research tower B1) | Turned on/ IDLE · isolator Turned off | Front to Back | VC-D @ 10 Hz | VC-B @ 10 Hz | ✓ PASS | ✗ FAIL |
Data and Image
1) Active — Vertical VC Curves
1) Active — Vertical Autospectrum
1) Active — Vertical Transmissibility
1) Active — Left to Right VC Curves
1) Active — Left to Right Autospectrum
1) Active — Left to Right Transmissibility
1) Active — Front to Back VC Curves
1) Active — Front to Back Autospectrum
1) Active — Front to Back Transmissibility
2) Passive — Vertical VC Curves
2) Passive — Vertical Autospectrum
2) Passive — Vertical Transmissibility
2) Passive — Left to Right VC Curves
2) Passive — Left to Right Autospectrum
2) Passive — Left to Right Transmissibility
2) Passive — Front to Back VC Curves
2) Passive — Front to Back Autospectrum
2) Passive — Front to Back Transmissibility
3) Turned off — Vertical VC Curves
3) Turned off — Vertical Autospectrum
3) Turned off — Left to Right VC Curves
3) Turned off — Left to Right Autospectrum
3) Turned off — Front to Back VC Curves
3) Turned off — Front to Back Autospectrum
Reference
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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