Tier-1 Semiconductor Cheonan C5 ZEISS GeminiSEM 460 DVIA-ML1000 (240709R2) Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-ML1000 installed at Tier-1 Semiconductor Cheonan campus.
After equipment placement, vibration measurement and tuning were carried out with the equipment in IDLE.
Vibration measurement for performance verification was conducted using Brüel & Kjær DAQ equipment.
Data are presented as VC curves with reference materials for vibration levels.
Vibration Isolation System Information
Model: DVIA-ML1000
Serial Number: 240709R2
Engineer
Chaewon Lee from DAEIL SYSTEMS
Date of Measurement
October 24, 2024
Tuning Date
N/A
Report written date
October 29, 2024
End User
Tier-1 Semiconductor
Installation Site
Tier-1 Semiconductor Cheonan campus, C5 building
Equipment Condition
장비 설치 및 IDLE
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: GeminiSEM 460
Measuring Equipment
7.1) Brüel & Kjær LAN-XI DAQ Type 3050
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
7.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration Measurement Setup
Bandwidth: 200 Hz
Lines: 800
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Vibration specification
Conclusion
The vibration specification is satisfied in all directions.
Measurement Summary
| Place of Measurement | Status | Direction | Floor | DVIA-ML1000 |
|---|---|---|---|---|
| Tier-1 Semiconductor Cheonan campus C5 building 1. Floor 2. DVIA-ML1000 | Equipment installed / IDLE | Vertical | VC-E @ 8 Hz | VC-G @ 8 Hz |
| Left to Right | VC-F @ 5 Hz | VC-G @ 5 Hz | ||
| Front to Back | VC-F @ 8 Hz | VC-G @ 8 Hz |
Measurement Data Obtained via UI Program
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment picture
Reference
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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