Installation Report

DVIA-P Series

01-15-2025

UNIST JEOL JBX-8100FS DVIA-P2200 Installation Report

DVIA-P Series

Installation Report

UNIST

JEOL

JBX-8100FS

DVIA-P2200

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at UNIST.

Vibration measurement and tuning were performed with the equipment Turned off.

Data are presented as VC curves together with reference materials on vibration levels.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 240910R3

Engineer

Chaewon Lee, Jonghwa Seo from DAEIL SYSTEMS

Measurement Date

January 15, 2025

Installation Site

UNIST Building 108 B1F Line

Prepared for

JEOL KOREA

End User

Ulsan National Institute of Science and Technology (UNIST)

Equipment Status

장비설치/Turned off

Equipment Information

Manufacturer: JEOL

Equipment: Electron Beam Lithography

Model: JBX-8100FS

Equipment Vibration Specifications

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Vibration specifications are satisfied in all directions.

Measurement Data

Measurement site	State	Direction	Spec		Measurement Data		Result
Measurement site	State	Direction	Floor	DVIA-P2200	Floor	DVIA-P2200
UNIST Building 108 B1F Line 1. Floor 2. DVIA-P2200	Turned off	Vertical	VC-E	VC-E @ 16 Hz	VC-G @ 16 Hz	✓ PASS	✓ PASS
		Left to Right	VC-F	VC-F @ 1 Hz	VC-G @ 1 Hz	✓ PASS	✓ PASS
		Front to Back	VC-F	VC-F @ 1 Hz	VC-G @ 1 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Narrowband

Vertical Transmissibility

Left to Right VC Curves

Left to Right Narrowband

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Narrowband

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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