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Installation Report
DVIA-P Series
02-13-2025

LB Semicon Pyeongtaek P2 Line Nordson Integra 4800 DVIA-P2200 Installation Report

DVIA-P Series
Installation Report
LB Semicon
Nordson
Integra 4800

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at LB Semicon Pyeongtaek P2 line.

Vibration measurement and tuning were conducted with the equipment Turned on after commissioning.

Air was blowing from the upper equipment toward the vibration isolation platform, which may affect tuning and vibration measurement results.

Data are presented as VC Curves together with reference materials on vibration levels.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 241223R2

Engineer

Chaewon Lee and Jonghwa Seo from DAEIL SYSTEMS

Measurement Date

February 13, 2025

Installation Site

LB Semicon Pyeongtaek P2 line

End User

LB Semicon

Equipment Status

장비 설치 및 Turned on

Equipment Information

Manufacturer: Nordson

Equipment: Auto Shear

Model: Integra 4800

Vibration specification

VC-B

Measuring Equipment

10.1) Brüel & Kjær LAN-XI DAQ Type 3040 DAQ

-Hardware: B&K Front End Type 3040-A-040

-Software: B&K Pulse Labshop 22 Version

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

The vibration specification was met in every direction.

Elevated vibration on the DVIA-P2200 relative to the floor in the 25–31.5 Hz band was attributed to excitation from the upper equipment itself.

Measurement Data

Measuring PointStatusSpecificationDirectionMeasurement DataResult
FloorDVIA-P2200FloorDVIA-P2200
LB 세미콘 평택 P2 line
1. Floor
2. DVIA-P2200
장비 설치/Turned onVC-BVerticalVC-B
@ 6.3 Hz
VC-E
@ 6.3 Hz
PASSPASS
Left to RightVC-C
@ 6.3 Hz
VC-E
@ 6.3 Hz
PASSPASS
Front to BackVC-A
@ 31.5 Hz
VC-E
@ 31.5 Hz
FAILPASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date02-13-2025
Tags
DVIA-P Series
Installation Report
LB Semicon
Nordson
Integra 4800