Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 241016R7).

DVIA-T76 (serial 250715R2) inspection report for Mutec Korea 1F cleanroom. Settling-time tuning reduced top-plate response from about 6 s to about 2 s at maximum stage speed; vibration measurement with equipment installed and Turned on/IDLE. Customer tool: Mutec Korea semiconductor inspection equipment model MG. Plots include before/after settling comparison and axis VC curves, autospectra, and transmissibility; Reference publishes the standard VC criteria table.

DVIA-ML1000 installation report — TESCAN SOLARIS X FIB-SEM (serial 250824R1) at STATSCHIPPACK Korea laboratory. Overview describes tuning and vibration measurement, equipment-mounted nested isolator with airflow and vibration from the tool. Vibration limits 10 µm/s (<30 Hz) and 20 µm/s (>30 Hz); measurement setup with Data Physics QUATTRO and PCB 393B05. Measurement summary PASS all axes; VC curves, Autospectrum, and Transmissibility per axis.

DVIA-MB1000 installation tuning for ZEISS MultiSEM FIB-SEM at Tsinghua McGovern (serial 250810R1-1). Tuning-request UI, vertical and horizontal transmissibility plots, and on-site equipment photo.

DVIA-MB1000 (SN 210112R6) tuning and vibration measurement at KIST L0 Building 1F laboratory for a TESCAN Amber X FIB-SEM. Engineer Chaewon Lee (DAEIL SYSTEMS); measurement 2025-10-27; report written 2025-10-28. Includes equipment manufacturer specification diagram, VC / autospectrum / transmissibility plots per axis, site equipment photo, and Generic Vibration Criteria as the standard markdown table (TESCAN header banner and Word reference EMF omitted).

Tier-1 Semiconductor Fabrication Facility Hwaseong NRD Line Bruker Femto-Pulse III DVIA-P4000 Installation Report