Installation Report

DVIA-M Series

10-28-2025

Korea Institute of Science and Technology (KIST) TESCAN Amber X DVIA-MB1000 Installation Report — 2025.10.28

DVIA-M Series

Installation Report

KIST

Korea Institute of Science and Technology

TESCAN

Amber X

FIB-SEM

DVIA-MB1000

210112R6

Customer

Korea Institute of Science and Technology

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement date

October 27, 2025

Report written date

October 28, 2025

Overview

Tuning and vibration measurement were performed for the DVIA-MB1000 relocated and installed at the Korea Institute of Science and Technology L0 Building, 1st floor laboratory.

Tuning and vibration measurement were carried out with the equipment installed and in Turned on/IDLE state.

Airflow was coming from the cooling fan installed on top of the isolation platform. This may affect tuning and vibration measurement.

After plotting Data as VC curves, reference material on vibration levels is provided.

Vibration Isolation System Information

Model: DVIA-MB1000

Serial Number: 210112R6

Installation Site

Korea Institute of Science and Technology, L0 Building, 1st floor laboratory

End User

Korea Institute of Science and Technology

Customer Equipment

Manufacturer: TESCAN

Equipment: FIB-SEM

Model: AMBER X

Equipment specification

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

The vibration specification is met in all directions.

Measurement Summary

Measurement Site	State	Direction	Meas. value (m/s rms) — Floor vibration	Meas. value — DVIA-MB1000	Result — Floor vibration	Result — DVIA-MB1000
Korea Institute of Science and Technology L0 Building, 1st floor laboratory · 1. Floor vibration · 2. DVIA-MB1000	Turned on/IDLE	Vertical	VC-A @ 63 Hz	VC-D @ 63 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 63 Hz	VC-E @ 63 Hz	✓ PASS	✓ PASS
		Front to Back	VC-C @ 63 Hz	VC-E @ 63 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A