KIST TESCAN AMBER X DVIA-MB1000 (P219) Installation and Measurement — 2021.02.10

DVIA-M Series

Installation Report

KIST

TESCAN

AMBER X

DVIA-MB1000

P219

(MB1000_P219 Set up)

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 21.02.19 (TUE)

Operator: Daeil System, Research engineer Choi, HyoungMun

Place of measurement : L0 2층 218호

Equipment Model: TESCAN-AMBER X

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

Test Condition	VC-Class Z	VC-Class X	VC-Class Y
Floor	A	C	D
Above Active	F	G	G

Good omnidirectional performance.

※ Vibration Criterion Curve

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm line widths.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A