Vibration Isolation Case Studies

DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab: tuning and vibration measurement on November 25, 2025, with Bruker Nano Indentation tester TS77 on the isolator. Two vibration measurement rounds (isolator plate vs floor, then instrument floor vibration). Measurement report written November 27, 2025. VC curves with floor vs DVIA traces, autospectra and transmissibility by axis on the isolated stage, followed by VC and autospectrum curves for equipment-floor vibration alone. Measurement tables include floor-vs-isolator pass/fail notation in the Vertical direction.

Gedeon Richter lab — JEOL SEM JSM-IT500HR on DVIA-ML1000 (250829R1).

DVIA-MB1000 installation report — ZEISS FE-SEM Sigma 560 (serial 231220R2). Overview states the platform is appropriately installed and functioning as intended. Prepared for, end user, and location are not filled on the published form (N/A). Equipment condition: The equipment is installed/IDLE. Tuning request field is blank (N/A). Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference with Generic Vibration Criteria as a markdown table (reference EMF omitted).

DVIA-MB1000 installation report — ZEISS FE-SEM Sigma 360 (serial 241209R2). Overview states the platform is appropriately installed and functioning as intended. End user and location are not filled on the published form (N/A). Equipment condition: The equipment is installed/Turned off. Tuning request field is blank (N/A). Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference with Generic Vibration Criteria as a markdown table (reference graphic omitted; generic criteria image only).

DVIA-MB1000 installation report — Thermo Fisher Scientific SEM Apreo 2S (serial 250421R8). Overview states the platform is appropriately installed and functioning as intended. End user, location, and tuning request are not filled on the published form (N/A). Equipment condition: The equipment is installed/Turned off. Transmissibility plots (vertical, left to right, front to back), on-site equipment photo, and Reference section with Generic Vibration Criteria as a markdown table (no separate reference graphic).

DVIA-MB1000 installation report — Ciqtek High Speed SEM HEM6000 (serial 250514R3), field package. Overview states the platform is appropriately installed and functioning as intended. The published form has no vibration specification section and no measurement summary table. End user and location fields are blank in the report; tuning request section has no content. Equipment condition: The equipment is installed/Turned off. Published figures: vertical, left-to-right, and front-to-back transmissibility; on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.