Vibration Isolation Case Studies

DVIA-M1000 installation report for Raith Voyager electron-beam lithography at Huarui Core Materials (Wuxi), serial 250805R3. The active vibration isolation platform is appropriately installed and functioning as intended. UI-program measurement package for this visit includes vertical, left-to-right, and front-to-back transmissibility plots, a tuning-request capture, and an on-site equipment photo.

DVIA-ULFB350 (S/N 250804R3) at ELP cleanroom Building A — tuning and vibration measurements on 31 Oct 2025; report 6 Nov 2025. Covers reinvestigation tuning for image instability, passive re-setup after equipment moved center, and Pulse 22 VC / autospectrum / transmissibility plots with equipment installed / Turned off in the measurement table.

DVIA-MB3000 (serial 250708R5-1) isolation platform installed under Thermo Fisher Scientific Cryo-TEM Krios G4 at Changping P3 Laboratory on November 5, 2025. Report includes tuning-request program capture, directional transmissibility plots (Vertical, Left to Right, Front to Back), equipment photograph, and Generic Vibration Criteria as a markdown table (no standalone reference graphic). Engineer Chaewon Lee (DAEIL SYSTEMS); report written 2025.11.11.

DVIA-ML1000 installation report at Changping P3 Laboratory — Thermo Fisher Scientific Cryo-Plasma FIB-SEM Arctis (serial 250715R9). Vertical, left-to-right, and front-to-back transmissibility plots, tuning-request capture, and on-site equipment photo.

DVIA-ULF700 (serial 250708R1-1) installation and vibration tuning at a Tier-1 Semiconductor fab 2F clean booth: measurement dated 2025-11-04 with equipment installed and Turned on/IDLE (rotary pump on plenum noted). Publication includes VC, autospectrum, and transmissibility plots for three axes; header artwork and VC reference illustration from the DOCX are omitted per site rules (markdown Reference table instead).

DVIA-ULF700 (serial 250708R1-1) installation and vibration tuning at a Tier-1 Semiconductor fab 2F clean booth (Rev 2 worksheet). Measurement report date 2025-11-04; SignalCalc VC / autospectrum / transmissibility plots for three axes with equipment status 장비 설치 및 Turned on/IDLE (verbatim from the report). Generic vibration criteria posted as markdown Reference table only (no artwork).