Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies

Peking University Shenzhen Graduate School Thermo Fisher Helios 5 CX FIB-SEM DVIA-M1000 (250613R3) Installation Report
DVIA-M1000 installation report — Thermo Fisher Scientific FIB-SEM Helios 5 CX (serial 250613R3) for Peking University Shenzhen Graduate School in Shenzhen, China. Overview states the platform is appropriately installed and functioning as intended. The publication follows the on-site form: no vibration specification or measurement summary table; equipment condition The equipment is installed/Turned off. Published figures: tuning-request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.

Changping P3 Laboratory Thermo Fisher HT Tank DVIA-MB1000 (250708R5-2) Installation Report
DVIA-MB1000 installation report at Changping P3 Laboratory — Thermo Fisher Scientific HT Tank (serial 250708R5-2). Vertical, left-to-right, and front-to-back transmissibility plots, tuning-request capture, and on-site equipment photo.

Zhuzhou Smelter Group ZEISS EVO 10 FE-SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 (S/N 250804R5) active vibration isolation platform installation report for ZEISS FE-SEM EVO 10 at Zhuzhou. Chaewon Lee (DAEIL SYSTEMS) tuned on November 10, 2025; report written November 11, 2025. Measurement summary table and UI-program VC curves, autospectra, and transmissibility vertical / left-to-right / front-to-back; tuning request UI capture and equipment photo.

Huarui Raith Voyager DVIA-M1000 (250805R3) Installation Report
DVIA-M1000 installation report for Raith Voyager electron-beam lithography at Huarui Core Materials (Wuxi), serial 250805R3. The active vibration isolation platform is appropriately installed and functioning as intended. UI-program measurement package for this visit includes vertical, left-to-right, and front-to-back transmissibility plots, a tuning-request capture, and an on-site equipment photo.

ELP Vision Inspection DVIA-ULFB350 (250804R3) Installation Report
DVIA-ULFB350 (S/N 250804R3) at ELP cleanroom Building A — tuning and vibration measurements on 31 Oct 2025; report 6 Nov 2025. Covers reinvestigation tuning for image instability, passive re-setup after equipment moved center, and Pulse 22 VC / autospectrum / transmissibility plots with equipment installed / Turned off in the measurement table.

Changping P3 Laboratory Thermo Fisher Scientific Cryo-TEM Krios G4 DVIA-MB3000 (250708R5-1) Installation Report — November 5, 2025
DVIA-MB3000 (serial 250708R5-1) isolation platform installed under Thermo Fisher Scientific Cryo-TEM Krios G4 at Changping P3 Laboratory on November 5, 2025. Report includes tuning-request program capture, directional transmissibility plots (Vertical, Left to Right, Front to Back), equipment photograph, and Generic Vibration Criteria as a markdown table (no standalone reference graphic). Engineer Chaewon Lee (DAEIL SYSTEMS); report written 2025.11.11.