Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies
Changping P3 Laboratory Thermo Fisher Arctis Cryo-Plasma FIB-SEM DVIA-ML1000 (250715R9) Installation Report
DVIA-ML1000 installation report at Changping P3 Laboratory — Thermo Fisher Scientific Cryo-Plasma FIB-SEM Arctis (serial 250715R9). Vertical, left-to-right, and front-to-back transmissibility plots, tuning-request capture, and on-site equipment photo.
Tier-1 Semiconductor 2F Clean Booth DVIA-ULF700 (250708R1-1) Installation Report
DVIA-ULF700 (serial 250708R1-1) installation and vibration tuning at a Tier-1 Semiconductor fab 2F clean booth: measurement dated 2025-11-04 with equipment installed and Turned on/IDLE (rotary pump on plenum noted). Publication includes VC, autospectrum, and transmissibility plots for three axes; header artwork and VC reference illustration from the DOCX are omitted per site rules (markdown Reference table instead).
Tier-1 Semiconductor 2F Clean Booth Self-made Equipment DVIA-ULF700 (250708R1-1) Installation Report
DVIA-ULF700 (serial 250708R1-1) installation and vibration tuning at a Tier-1 Semiconductor fab 2F clean booth (Rev 2 worksheet). Measurement report date 2025-11-04; SignalCalc VC / autospectrum / transmissibility plots for three axes with equipment status 장비 설치 및 Turned on/IDLE (verbatim from the report). Generic vibration criteria posted as markdown Reference table only (no artwork).
DVIA-ML1000 (241016R7) Installation Report
DVIA-ML1000 installation report (serial 241016R7).
Mutec Korea DVIA-T76 (250715R2) Inspection Report
DVIA-T76 (serial 250715R2) inspection report for Mutec Korea 1F cleanroom. Settling-time tuning reduced top-plate response from about 6 s to about 2 s at maximum stage speed; vibration measurement with equipment installed and Turned on/IDLE. Customer tool: Mutec Korea semiconductor inspection equipment model MG. Plots include before/after settling comparison and axis VC curves, autospectra, and transmissibility; Reference publishes the standard VC criteria table.
STATSCHIPPACK Korea TESCAN SOLARIS X FIB-SEM DVIA-ML1000 (250824R1) Installation Report
DVIA-ML1000 installation report — TESCAN SOLARIS X FIB-SEM (serial 250824R1) at STATSCHIPPACK Korea laboratory. Overview describes tuning and vibration measurement, equipment-mounted nested isolator with airflow and vibration from the tool. Vibration limits 10 µm/s (<30 Hz) and 20 µm/s (>30 Hz); measurement setup with Data Physics QUATTRO and PCB 393B05. Measurement summary PASS all axes; VC curves, Autospectrum, and Transmissibility per axis.