Installation Report

DVIA-T Series

10-31-2025

Mutec Korea DVIA-T76 (250715R2) Inspection Report

DVIA-T Series

Installation Report

Mutec Korea

DVIA-T76

250715R2

Author

Engineer: Chaewon Lee

Measurement Date

October 31, 2025

Report Written Date

October 31, 2025

Overview

Inspection was performed on the DVIA-T76 installed in the 1F cleanroom at Mutec Korea.

When the equipment moved at maximum speed, the isolator top-plate Settling time was very long; tuning was performed to address this.

Tuning and vibration measurements were conducted with the equipment installed and in a Turned on/IDLE state.

Data are presented as VC curves, and Reference materials are provided for the vibration levels.

Vibration Isolation Platform

Model: DVIA-T76

Serial number: 250715R2

Engineer

Chaewon Lee from DAEIL SYSTEMS, field engineer

Inspection Date

October 31, 2025

Installation Site

Mutec Korea 1F cleanroom

End User

Mutec Korea

Customer Equipment

Manufacturer: Mutec Korea

Equipment: Semiconductor inspection equipment

Model: MG

Equipment Specification

Equipment Status

Equipment installed / Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration Measurement Setup

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

During the initial inspection, when the stage was operated at 200 m/s, the Settling Time on the isolator top plate was measured at approximately 6 seconds.

To reduce the Settling Time, the isolator flotation height was changed to increase spring stiffness, and tuning was performed to improve isolator performance.

After tuning, the Settling time was confirmed to have decreased to approximately 2 seconds.

Measurement Data

Place of Measurement	Status	Direction	Floor	DVIA-T76
Mutec Korea 1F cleanroom 1. Floor vibration 2. DVIA-T76	Equipment installed / Turned on/IDLE	Vertical	VC-E @ 16 Hz	VC-G @ 16 Hz
		Left to Right	VC-C @ 50 Hz	VC-G @ 50 Hz
		Front to Back	VC-C @ 100 Hz	VC-G @ 100 Hz

Data and Image

Before/After Settling Time Comparison

Settling Time Before Tuning (approx. 6 s)

Settling Time After Tuning (approx. 2 s)

Vibration Measurement Data

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A