AOV CO.,LTD GBS smartWLI Firebolt8 WLI DVIA-T56 (260813R3) Installation Report
Contents
Overview
Following delivery of the DVIA-T56 demo unit to the AOV laboratory in Taipei, Taiwan (2026.09.10), an oscillation issue was reported, and remote tuning was performed.
Vibration measurement was conducted with the equipment in the turned on state.
Data is represented in VC Curve format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-T56
Serial Number: 260813R3
Engineer
Changhyeon Moon · DAEIL SYSTEMS
Tuning Date
2026.10.22
End User
AOV CO.,LTD
Number of Tuning Trial
1st
Location
Taipei City / No. 363, Songjiang Rd., Zhongshan Dist/ 2F
Equipment
Manufacturer: GBS metrology GmbH
Equipment: WLI
Model: GBS smartWLI Firebolt8
Vibration Specification
Applied criterion: VC-D criterion curve (IEST-RP-CC012.2; see Section 18, References)
This is a customer-specified requirement and not part of the manufacturer's standard specifications.
| Frequency [Hz] | Allowable [VC-Curve] |
|---|---|
| 1 ~ 3.15 | 6.25 (VC-D) |
| 4-80 | 6.25 (VC-D) |
Evaluation band: 4–80 Hz (measured over 1–100 Hz; bands below 4 Hz and above 80 Hz are shown for reference only)
Evaluation: Compliant if all 1/3 octave band levels within the evaluation band are at or below the criterion on each of the X, Y, and Z axes.
Equipment Condition
The equipment is turned on or IDLE
Measurement Instrumentation
Measurement Equipment
| Item | UI (built-in sensors of the vibration isolation table) |
|---|---|
| Instrument / Software | DVIA-T56 · DAEIL SYSTEMS Tuning Software DVIA-ML/ULF (6 DOF) Ver 2.0.2 |
| Sensors | Built-in velocity sensors of the vibration isolation table (Top / Bottom) |
| Channels | Top = tabletop of the vibration isolation table |
| Bottom = base of the vibration isolation table |
Measurement Setup
F Span: 136.7 Hz
Lines: 1600
Engineering Units: m/s
Window: Hanning
Averaging · Overlap: 100 · Overlap 99 %
Tuning Request
1) Oscillation resolve
2) Z axis: within VC-D. Tuning was focused on the Z axis at the customer's request, as it is the axis with the greatest impact on equipment performance.
Conclusion
1) Following the tuning of the DVIA-T56 active vibration isolation system, the vibration performance requirements specified by the customer have been satisfied.
2) In the vertical (Z) direction, the top vibration was VC-G (0.6 µm/s rms @ 22.8 Hz) while the mounting surface (base) vibration was VC-B (12.6 µm/s rms @ 22.8 Hz).
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Measurement Data | Result | ||
|---|---|---|---|---|---|---|
| Floor | DVIA-T56 | Floor | DVIA-T56 | |||
| 1. Floor 2. DVIA-T56 | See Section 9 | Vertical | VC-B 12.6µm/s @ 22.8Hz | VC-G 0.6µm/s @ 22.8Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-B 13.8µm/s @ 18.0Hz | VC-E 2.3µm/s @ 1.1Hz | ✗ FAIL | ✓ PASS | ||
| Front to Back | VC-A 26.7µm/s @ 17.8Hz | VC-G 0.6µm/s @ 17.8Hz | ✗ FAIL | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical — VC Curves
Vertical — Autospectrum
Left to Right — VC Curves
Left to Right — Autospectrum
Front to Back — VC Curves
Front to Back — Autospectrum
Installation Photo
Equipment
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
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