Shanghai Opotong Instruments COXEM EM 40 DVIA-T56 (260202R1-6) Re-Tuning Report
Contents
Prepared by
Engineer: Juhyeok Kim
Tuning date: 26.05.14
Report written date: 26.05.14
Overview
Re-tuning due to the DVIA-T56 active vibration oscillation
Vibration Isolation System Information
Model: DVIA-T56
Serial Number: 260202R1
Engineer
Juhyeok Kim DAEIL SYSTEMS
Tuning Date
May 14, 2026
End User
Shanghai Opotong Instruments Co., Ltd.
Number of Tuning Trial
1st
Location
Shanghai, China
Equipment
Manufacturer: COXEM
Equipment: Tabletop SEM
Model: EM 40
Vibration Specification
N/A
(I heard that Thermo Fisher Scientific sets the VC vibration specification standard every time we do it. I don't have YIMO, and I heard that the VC vibration standard specification changes every time in the equipment specification, so I couldn't write down the exact vibration specification.)
Equipment Condition
The equipment is turned On/IDLE
Tuning Request
1st
Measurement Summary
| Measurement Point | Status | Vibration Specification | Axis | Floor | DVIA-T56 |
|---|---|---|---|---|---|
| 1.Floor2.DVIA-T56 | Equipment is Turned on/IDLE | - | Vertical | VC-B @ 25 Hz | VC-D @ 25 Hz |
| Left to Right | VC-A @ 25 Hz | VC-G @ 25 Hz | |||
| Front to Back | VC-A @ 25 Hz | VC-C @ 25 Hz |
Measurement Data Obtained via UI Program
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
12.Equipment picture
13. Reference
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
2. Detail size refers to width in microelectronics fabrication or particle size in medical research.
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