Installation Report

DVIA-T Series

05-06-2026

Shuyu Industrial SCINCO STA 1000 DVIA-T56 (250102R2-2) Re-Tuning Report

DVIA-T Series

Installation Report

Re-Tuning Report

YIMO

Shuyu Industrial

SCINCO

STA 1000

DVIA-T56

250102R2-2

Prepared by

Engineer: Juhyeok Kim

Tuning date: 26.05.06

Report written date: 26.05.06

Overview

Re-tuning due to the DVIA-T56 active vibration oscillation

Vibration Isolation System Information

Model: DVIA-T56

Serial Number: 250102R2

Engineer

Juhyeok Kim DAEIL SYSTEMS

Tuning Date

May 6, 2026

End User

Shuyu Industrial Co., Ltd

Number of Tuning Trial

N/A

Location

N/A

Equipment

Manufacturer: N/A

Equipment: SCINCO

Model: STA 1000

Vibration Specification

N/A

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

N/A

Measurement Summary

Measurement Point	Status	Vibration Specification	Axis	Floor	DVIA-T56
1.Floor2.DVIA-T56	Equipment is Turned on/IDLE	Refer to item 9	Vertical	VC-B@ 25 Hz	VC-D@ 25 Hz
			Left to Right	VC-A@ 25 Hz	VC-G@ 16 Hz
			Front to Back	VC-A@ 25 Hz	VC-C@ 25 Hz

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Photography does not allowed

13. Reference

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A