Installation Report

DVIA-ULF Series

11-06-2025

ELP Vision Inspection DVIA-ULFB350 (250804R3) Installation Report

DVIA-ULF Series

Installation Report

ELP

Vision Inspection

DVIA-ULFB350

250804R3

Overview

Installation tuning and vibration measurements were performed after installing the DVIA-ULFB350 anti-vibration platform in Building A of the ELP cleanroom.

Vibration measurement and tuning were conducted with the equipment installed and turned on.

A reinvestigation and tuning visit was conducted following a customer request addressing image instability when using the anti-vibration platform.

Passive setup had become unstable after equipment that had been placed on the left side was moved toward the center; passive was reset and tuning was resumed.

Data are plotted as VC curves, and vibration-level reference notes are cited below.

Vibration Isolation System Information

Model: DVIA-ULFB350

Serial Number: 250804R3

Engineer

Park Donggyu, Developer Team Engineer, DAEIL SYSTEMS

Measurement Date

October 31, 2025

Installation Site

ELP Cleanroom Building A

End User

ELP

Equipment Status

Equipment installed/Turned on

Customer Equipment

Manufacturer: ELP

Equipment: Vision inspection system (화질검사 설비)

Model: -

Vibration Specifications

Measuring Equipment

10.1) Pulse 22

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

10.2) ) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

Bandwidth: 200 Hz

Lines: 3200

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

Conclusion

With the equipment operating, stable anti-vibration performance was verified.

On the vibration-isolation tabletop, VC‑G vibration was measured in every direction.

After confirming the allowable equipment-movement range together with the customer, stable passive isolation was verified across all travel ranges.

Together with the customer, it was verified that image instability did not recur when operating the vibration-isolation platform.

Measurement Data

Measuring Site	Status	Direction	Floor Vibration	DVIA-ULFB350
ELP Cleanroom Building A 1. Floor vibration 2. DVIA-ULFB350	Equipment installed/ Turned off	Vertical	VC-E @ 50 Hz	VC-G @ 50 Hz
		Left to Right	VC-G @ 31 Hz	VC-G @ 31 Hz
		Front to Back	VC-F @ 50 Hz	VC-G @ 70 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment Photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A