Installation Report

DVIA-ULF Series

07-30-2025

ELP Vision Inspection System DVIA-ULFB350 Installation Report

DVIA-ULF Series

Installation Report

ELP

DVIA-ULFB350

Vision Inspection

Overview

DVIA-ULFB350 tuning and vibration measurement were conducted for the system installed in ELP cleanroom Building A. With the equipment installed and in the Turned off state, vibration measurement and tuning were performed. The data are presented as VC curves, and reference materials on the vibration levels are provided.

Vibration Isolation System Information

Model: DVIA-ULFB350

Serial Number: 250617R4

Engineer

Chaewon Lee, DAEIL SYSTEMS Field Engineer

Measurement Date

July 29, 2025

Report Written Date

July 30, 2025

Measuring Location

ELP cleanroom Building A

End User

ELP

Equipment Status

장비설치/Turned off

Equipment Information

Manufacturer: ELP

Equipment: Vision Inspection System

Model: -

Vibration Specifications

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

VC-G vibration is measured in all directions.

Measurement Data

Measuring Point	Status	Direction	Floor	DVIA-ULFB350
ELP cleanroom Building A 1.Floor 2.DVIA-ULFB350	장비설치/ Turned off	Vertical	VC-D @ 100 Hz	VC-G @ 100 Hz
		Left to Right	VC-F @ 16 Hz	VC-G @ 16 Hz
		Front to Back	VC-D @ 16 Hz	VC-G @ 16 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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