Vibration Isolation Case Studies

DVIA-M1000 serial 230908R3-1 — Tianjin University, Thermo Fisher Scientific ESEM Quattro110. Handout covers set-up on 2023.12.13 with internal-program performance plots for Z, X, and Y axes; equipment/site photo after the title block (cover logo omitted from publication).

DVIA-P2200 (140416R6-6) inspection and vibration measurement at Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A, Suwon, with EVG 6200 aligner (IDLE). Published figures: installation site, sensor checks, axis transmissibility and VC curves (including 21.12.15 comparison), and grating-contact issue photo.

DVIA-M1000 abbreviated worksheet (serial 230818R1-1). Setup dated 23.11.29 and reporting dated 23.12.06; measurement date 2023.11.29 (Wednesday) in Wuxi with operator Jongwon Park from DAEIL SYSTEMS. END USER GRGT; target equipment Helios G5 CX DualBeam and installation site Wuxi as in the form. The Overview block states the standard DVIA-M1000 sentence only. No vibration specification, equipment status, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title in the source reads “M1000 internal program performance measurement result”; published figures are three plots labeled Z axis, X axis, and Y axis. Decorative header graphics from the Word file are omitted from public copy.

DVIA-MB3000 (serial 221130R3, platform DVIA-MB3000 - 1800 x 1300 mm) VEC installation worksheet at Ohio State University Nanotech West Lab with Raith EPBG 5150. Form tuning date 23.11.30; UI program transmissibility (Z/X/Y) and VEC plots including floor/active VC, floor/active vibration, high-frequency transmissibility, and repeat-axis transmissibility curves per the worksheet; Reference as a markdown Generic Vibration Criteria table (no separate criterion figure). Engineer Youngha Lee (DAEIL SYSTEMS); report written date on form 23.12.19.

RAITH EBPG5150 E-Beam Lithography System DVIA-MB3000 Installation

Commissioning-format memo (SN 221202R6): installation photograph under the M1000 setup heading and M1000 internal-program Z / X / Y axis measurement captures from the Signal program.