Vibration Isolation Case Studies

Tier-1 Semiconductor Giheung SR1 Bruker AFM NM-VI DVIA-P4000 inspection report (serial 200805R3)

IST-format handout — DVIA-M1000 serial 230927R4 with ZEISS FE-SEM Gemini 560 at Shanghai (setup 2023-12-18, report written 2023-12-19). Published figures from the IST document: bench installation photograph and M1000 UI results for Z, X, and Y axes.

Tier-1 Semiconductor Advanced Institute SAIT Cleanroom Building A: DVIA-P7000 (140416R6-2) inspection on Nikon NSR-2205i12D stepper with IDLE-state vibration measurement, VC summary, transmissibility, and sensor checks.

SHOWA-format inspection and vibration measurement report (inspection December 14, 2023; written December 18, 2023) for VAAV-4000H serial 036174 (SAC-07) at Tier-1 Semiconductor Hwaseong NRD Line 8F with Bruker AFM NM-4. Publishes VC summary table (Floor vs Active), displacement and accelerometer graphs, axis transmissibility and VC curves, regulator and unit photographs from the source document.

Inspection and vibration measurement report (inspection December 14, 2023; written December 18, 2023) for DVIA-P4000 serial 039887B (SAC-07) at Tier-1 Semiconductor Hwaseong NRD Line 3F with Bruker LA-02. Publishes Floor vs Active VC summary table, displacement and accelerometer graphs, and axis transmissibility and VC curves from the source document.

CESI Beijing — Thermo Fisher Scios 2 DualBeam on DVIA-M1000 (220321R6): site tables, set-up photograph, and M1000 internal-program Z / X / Y performance captures.