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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1248 case studies
ARCHE Semilab AFM-2000 DVIA-UB350 Inspection Report
Installation Report
DVIA-ULF Series
11-21-2023

ARCHE Semilab AFM-2000 DVIA-UB350 Inspection Report

DVIA-UB350 (S/N 220621R1) active vibration isolation platform inspection report for Semilab AFM-2000 installed at ARCHE (147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si, Gyeonggi-do). Z / X / Y-axis Transmissibility and VC-Curve measurements taken in idle state and with AFM in operation. All three axes achieve VC-G on the DVIA-UB350 in idle; X-axis shows suspected 60 Hz electrical noise during AFM operation.

Nanochip ZEISS GeminiSEM 300 DVIA-M1000 (220919R4-1) Installation Report

DVIA-M1000 abbreviated worksheet for serial 220919R4-1. Target equipment GeminiSEM 300 with END USER Nanochip; installation place Shanghai; setup and reporting dated 23.11.20 per the form; operator Park, Jongwon; measurement dated 2023.11.20 (Monday). Overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the M1000 internal program caption. Decorative bitmap embedded on the Nanochip header line was omitted from the public page.

Tier-1 Semiconductor Hwaseong NRD Line ZEISS AIMS 1x DVIA-P4000 (220804R2) Inspection Report

DVIA-P4000 (S/N 220804R2) inspection at Tier-1 Semiconductor Hwaseong NRD Line 3F with ZEISS AIMS 1x equipment — open-loop tests, feedback and feedforward transmissibility, VC curves (equipment off/on), and comparison with September 2022 baseline data.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report

DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.

Thermo Fisher Scientific Apreo 2S HiVac DVIA-M1000 Installation Report

GRGT / Shanghai — Apreo 2S HiVac on DVIA-M1000 (230905R2). M1000 internal program measurement (full view and Z/X/Y plots).

TUSUR, Tomsk Emcraft Veritas 3100 DVIA-MB1000 Installation Report — 2023.10.27

DVIA-MB1000 (SN 220825R6-3) under Emcraft Veritas 3100 for TUSUR, Tomsk, Russia — engineer itinerary, onsite tuning window, Z/X/Y transmissibility plots (no standalone equipment photograph in source).