Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies

ARCHE Semilab AFM-2000 DVIA-UB350 Inspection Report
DVIA-UB350 (S/N 220621R1) active vibration isolation platform inspection report for Semilab AFM-2000 installed at ARCHE (147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si, Gyeonggi-do). Z / X / Y-axis Transmissibility and VC-Curve measurements taken in idle state and with AFM in operation. All three axes achieve VC-G on the DVIA-UB350 in idle; X-axis shows suspected 60 Hz electrical noise during AFM operation.

Nanochip ZEISS GeminiSEM 300 DVIA-M1000 (220919R4-1) Installation Report
DVIA-M1000 abbreviated worksheet for serial 220919R4-1. Target equipment GeminiSEM 300 with END USER Nanochip; installation place Shanghai; setup and reporting dated 23.11.20 per the form; operator Park, Jongwon; measurement dated 2023.11.20 (Monday). Overview sentence as printed. Internal-program plots use axis labels Z axis, X axis, and Y axis under the M1000 internal program caption. Decorative bitmap embedded on the Nanochip header line was omitted from the public page.
Tier-1 Semiconductor Hwaseong NRD Line ZEISS AIMS 1x DVIA-P4000 (220804R2) Inspection Report
DVIA-P4000 (S/N 220804R2) inspection at Tier-1 Semiconductor Hwaseong NRD Line 3F with ZEISS AIMS 1x equipment — open-loop tests, feedback and feedforward transmissibility, VC curves (equipment off/on), and comparison with September 2022 baseline data.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report
DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.

Thermo Fisher Scientific Apreo 2S HiVac DVIA-M1000 Installation Report
GRGT / Shanghai — Apreo 2S HiVac on DVIA-M1000 (230905R2). M1000 internal program measurement (full view and Z/X/Y plots).

TUSUR, Tomsk Emcraft Veritas 3100 DVIA-MB1000 Installation Report — 2023.10.27
DVIA-MB1000 (SN 220825R6-3) under Emcraft Veritas 3100 for TUSUR, Tomsk, Russia — engineer itinerary, onsite tuning window, Z/X/Y transmissibility plots (no standalone equipment photograph in source).