Installation Report
DVIA-M Series
12-19-2023
Integrated Service Technology ZEISS Gemini 560 DVIA-M1000 (230927R4) Setup — Shanghai
DVIA-M Series
Installation Report
Integrated Service Technology
Shanghai
ZEISS
Gemini 560
FE-SEM
DVIA-M1000
230927R4
Contents
Integrated Service Technology
(M1000_ 230927R4 Set up)
Vibration Isolation System Information
Model: DVIA-M1000
Serial Number: 230927R4
Target equipment
Gemini 560
Place of installation
Shanghai
Remark
Good Performance
END USER
Integrated Service Technology
Operator: Lee, Youngha
Date of setup: 23.12.18
Date of reporting: 23.12.19
Date of business trip : 17.12.27~17.12.29
Measurement date
2023.12.18 (Monday)
Operator: DAEIL SYSTEMS Youngha Lee
Place of measurement
Shanghai
Equipment Model
ZEISS FE-SEM Gemini 560
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
5.
M1000 internal program performance measurement result
Data and Image
Bench installation photograph
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date12-19-2023
Tags
DVIA-M Series
Installation Report
Integrated Service Technology
Shanghai
ZEISS
Gemini 560
FE-SEM
DVIA-M1000
230927R4
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