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Installation Report
DVIA-M Series
05-15-2026

ZEISS Sigma360 FE-SEM DVIA-M1000 (231205R4) Installation Report — Guizhou Phosphate

DVIA-M Series
Installation Report
Guizhou Phosphate
Guizhou
ZEISS
Sigma360
FE-SEM
DVIA-M1000
231205R4

Contents

(M1000_ 231205R4 Set-up)

Equipment picture

Target equipment

ZEISS Sigma360

Place of installation

Guizhou

Remark

Good Performance

END USER

Guizhou Phosphate

Operator

Operator: Chaewon Lee

Date of setup: 24.07.17

Date of reporting: 24.07.19

Date of business trip

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2024.07.17(Wednesday)

Operator: Chaewon Lee from DAEIL SYSTEMS

Place of measurement: Guizhou

Equipment Model:

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma360

5.

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date05-15-2026
Tags
DVIA-M Series
Installation Report
Guizhou Phosphate
Guizhou
ZEISS
Sigma360
FE-SEM
DVIA-M1000
231205R4

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