Installation Report
DVIA-M Series
03-27-2025
ZEISS FE-SEM GeminiSEM 360 DVIA-M1000 (241220R2) Installation Report
DVIA-M Series
Installation Report
DVIA-M1000
241220R2
ZEISS
GeminiSEM 360
FE-SEM
Shanghai
Contents
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Vibration Isolation System Information
Model: DVIA-M1000
Serial Number: 241220R2
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
March 26, 2025
Report written date
25.03.27
Number of Tuning Trial
1st
Location
Shanghai, China
End User
Shanghai Jiao Tong University
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: GeminiSEM 360
Equipment Condition
The equipment is installed/IDLE
Tuning Request
N/A
Data and Image
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
Equipment
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
Detail size refers to width in microelectronics fabrication or particle size in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date03-27-2025
Tags
DVIA-M Series
Installation Report
DVIA-M1000
241220R2
ZEISS
GeminiSEM 360
FE-SEM
Shanghai
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