Skip to main content
Installation Report
DVIA-M Series
08-25-2025

Tianjin Institute of Hematology ZEISS GeminiSEM 360 DVIA-M1000 (250530R5-1) Installation Report

DVIA-M Series
Installation Report
YIMO
Tianjin Institute of Hematology
ZEISS
FE-SEM
GeminiSEM 360
Tianjin
DVIA-M1000

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 250530R5-1

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

August 20, 2025

Report written date

August 25, 2025

End User

Tianjin Institute of Hematology

Number of Tuning Trial

1st

Location

Tianjin

Equipment

Manufacturer: ZEISS

Equipment: FE -SEM

Model: GeminiSEM 360

Equipment Condition

The equipment is installed / Turned off

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

Share this Case Study

Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date08-25-2025
Tags
DVIA-M Series
Installation Report
YIMO
Tianjin Institute of Hematology
ZEISS
FE-SEM
GeminiSEM 360
Tianjin
DVIA-M1000

Related Case Studies

YIMO Tianjin Institute of Hematology ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (250530R5-2) Installation Report
DVIA-M Series

YIMO Tianjin Institute of Hematology ZEISS Crossbeam 550 FIB-SEM DVIA-M1000 (250530R5-2) Installation Report

08-25-2025Read more
YIMO ZEISS FE-SEM Sigma 360 DVIA-M1000 (241111R1) Installation Report
DVIA-M Series

YIMO ZEISS FE-SEM Sigma 360 DVIA-M1000 (241111R1) Installation Report

03-07-2025Read more
YIMO Shennan Circuit ZEISS FE-SEM Sigma560 DVIA-M1000 (240607R6) Installation Report
DVIA-M Series

YIMO Shennan Circuit ZEISS FE-SEM Sigma560 DVIA-M1000 (240607R6) Installation Report

02-21-2025Read more