Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
RAITH EBPG5150 E-Beam Lithography System DVIA-MB3000 Installation Report
RAITH EBPG5150 E-Beam Lithography System DVIA-MB3000 Installation
Hitachi FE-SEM SU8600 DVIA-M1000 Internal Program Performance Report — Toyota, Shanghai (2023)
Commissioning-format memo (SN 221202R6): installation photograph under the M1000 setup heading and M1000 internal-program Z / X / Y axis measurement captures from the Signal program.
China University Of Geosciences (Wuhan) Apreo DVIA-M1000 (230224R2) Installation Report
DVIA-M1000 abbreviated worksheet (serial 230224R2). Setup and reporting dated 23.11.24; measurement date 2023.11.24 (Friday) in Wuhan with operator Jongwon Park from DAEIL SYSTEMS. END USER China University Of Geosciences, Wuhan; target equipment Apreo and installation site Wuhan as in the form. The Overview block states the standard DVIA-M1000 sentence only. No vibration specification, equipment status, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title in the source reads “M1000 internal program performance measurement result”; published figures are three plots labeled Z axis, X axis, and Y axis. Decorative header graphics from the Word file are omitted from public copy.
Beijing Academy of Quantum Information Sciences STM DVIA-M1000 (230905R3) Installation Report
DVIA-M1000 installation report (serial 230905R3) — STM at Beijing Academy of Quantum Information Sciences, BEIJING. Short handout: overview, measurement metadata, and M1000 internal program Z/X/Y performance measurement captures. Reference uses the standard Generic Vibration Criteria markdown table only.
Omicron STM DVIA-MB1000 (230905R3) Installation Report — MB1000 internal program
DVIA-MB1000 compact installation handout (serial 230905R3) for an Omicron STM. The source lists END USER and installation/measurement locations as "-"; reporting matches setup on 23.11.23. Published captures are the MB1000 internal program Z/X/Y performance screens only; the Word source has no Reference / VC criteria appendix.
ARCHE Semilab AFM-2000 DVIA-UB350 (220621R1) Inspection Report
DVIA-UB350 (serial 220621R1) inspection report for Semilab AFM-2000 at ARCHE (147, Annyeong-gil, Byeongjeom-gu, Hwaseong-si). Tuning date 23.11.21; report 23.11.22. Idle-state and AFM-operation vibration summary tables, Z/X/Y transmissibility and VC-curve plots; Korean field notes on VC levels and suspected 60 Hz electrical noise on X during AFM. Decorative header graphic omitted; Reference uses the standard VC criteria markdown table only.