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Installation Report
DVIA-M Series
12-28-2023

Guangzhou Govisionox Helios 5 PFIB CXe DVIA-M1000 (230904R1) Installation Report

DVIA-M Series
Installation Report
Guangzhou Govisionox
DVIA-M1000
230904R1
Helios 5 PFIB CXe
Thermo Fisher Scientific
Guangzhou

Guangzhou Govisionox Technology Co., Ltd.

Guangzhou Govisionox Technology Co., Ltd.

(M1000_ 230904R1 Set up)

Site checklist

Target equipmentHelios 5 PFIB Cxe
Place of installationGuangzhou
RemarkGood Performance
END USERGuangzhou Govisionox Technology Co., Ltd.

Operator and dates

Operator: Lee, Sangjae

Date of setup: 23.12.27

Date of reporting: 23.12.28

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2023.12.27 (Wednesday)

Operator: DAEIL SYSTEMS Sangjae Lee

Place of measurement: Guangzhou

Equipment Model: Thermo Fisher Scientific FIB-SEM Helios 5 PFIB CXe DualBeam

5.

M1000 internal program performance measurement result

Z axis

X axis

Y axis

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date12-28-2023
Tags
DVIA-M Series
Installation Report
Guangzhou Govisionox
DVIA-M1000
230904R1
Helios 5 PFIB CXe
Thermo Fisher Scientific
Guangzhou