YIMOTECH Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-M1000 Installation Report
Contents
Overview
Following the installation of DVIA-M1000 at Suzhou in China, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the state.
Data is represented in VC Curve format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-M1000
Serial Number: 251203R7
Engineer
Taehun KIM, DAEIL SYSTEMS
Tuning Date
2026.07.02
End User
Suzhou Institute of Nano-tech and Nano-bionics, SINANO
Number of Tuning Trial
1st
Location
Suzhou in China
Equipment
Manufacturer: Thermo Fisher Scientific
Equipment: FIB-SEM
Model: Helios 5CX
Vibration Specification
VC-F
Equipment Condition
IDLE
Tuning Request
Conclusion
The raw floor vibration levels at the installation site did not satisfy the required vibration specification for the Helios 5CX FIB-SEM. Upon installation and tuning of the DVIA-M1000 active vibration isolation system, the vibration levels were confirmed to meet the required specification. The system has been tuned and is operating normally.
Measurement Summary
| Measurement Point | Status | Vibration Specifications | Axis | Floor | DVIA-M1000 |
|---|---|---|---|---|---|
| 1. Floor 2. DVIA-M1000 | IDLE | See Section 9 | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✗ FAIL | ✓ PASS | |||
| Front to Back | ✗ FAIL | ✓ PASS |
Measurement Data Obtained via UI Program
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Installation Photo
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.
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