Installation Report

DVIA-M Series

07-06-2026

YDRICQS Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

YDRICQS

Thermo Fisher Scientific

Helios 5CX

FIB-SEM

DVIA-ML1000

251014R5

Suzhou

Overview

Following the installation of DVIA-ML1000, system tuning and vibration measurements were performed.

The vibration measurements were conducted with the equipment in the operating state.

The measurement results are presented in VC curve format, together with reference information on the corresponding vibration criteria.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 251014R5

Engineer

Taehun kim, DAEIL SYSTEMS

Tuning Date

June 25, 2026

End User

YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center)

Number of Tuning Trial

1st

Location

Suzhou, China

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: FIB-SEM

Model: Helios 5CX

Vibration Specification

VC-F

Equipment Condition

Turned on

Tuning Request

Conclusion

The vibration isolation system was successfully installed and commissioned at the customer site. Due to the significant crosswind generated by the HVAC system in the installation environment, elevated background noise levels were observed during open-loop measurements. Notwithstanding these environmental conditions, the system demonstrated satisfactory isolation performance upon initial tuning, with all measured results meeting the specified requirements.

Measurement Summary

Measurement Point	Vibration Specifications	Axis	Floor	DVIA-ML1000
1. Floor 2. DVIA-ML1000	See Section 9	Vertical	✗ Fail	✓ PASS
		Left to Right	✓ PASS	✓ PASS
		Front to Back	✓ PASS	✓ PASS

Data and Image

Vertical Auto Spectrum

Vertical VC Curves

Left to Right Auto Spectrum

Left to Right VC Curves

Front to Back Auto Spectrum

Front to Back VC Curves

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude (μm/s) (μin/s)	Detail Size (μm)
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.