Installation Report

DVIA-M Series

08-12-2026

YIMO TECH Broadcast and Television Metrology Thermo Fisher Talos FIB-SEM DVIA-ML1000 Installation Report

DVIA-M Series

Installation Report

YIMO TECH

Broadcast and Television Metrology

Thermo Fisher Scientific

FIB-SEM

Talos

DVIA-ML1000

251206R2-9

Wuxi

Overview

The DVIA-ML1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 251206R2-9

Engineer

Juhyeok.kim DAEIL SYSTEMS

Tuning Date

Jun 05, 2026

End User

Broadcast and Television Metrology

Number of Tuning Trial

1st

Location

Wuxi, China

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: FIB-SEM

Model: Talos

Vibration Specification

Thermo Fisher Scientific conducts site surveys using SE-Tools to measure floor vibration, magnetic fields, and acoustic noise, and provides site-specific ambient vibration requirements through a site survey report. Therefore, the vibration specifications may vary depending on the survey results.

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

Measurement Summary

Measurement Point	Status	Vibration Specification	Axis	Measurement Data(RMS, μm/s)		Measurement Result
Measurement Point	Status	Vibration Specification	Axis	Floor	DVIA-ML1000	Floor	DVIA-ML1000
1.Floor 2.DVIA-ML1000	Equipment is Turned on/IDLE	See Section 9	Vertical	4.62 @ 15.5 Hz	0.11 @ 15.5 Hz	✓ PASS	✓ PASS
			Left to Right	0.71 @ 4.5 Hz	0.14 @ 4.5 Hz	✓ PASS	✓ PASS
			Front to Back	0.58 @ 3.5 Hz	0.034 @ 3.5 Hz	✓ PASS	✓ PASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion Curve	Description of Use	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3µm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1µm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1 - 3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1 - 0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	< 0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

Notes:

1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

2. The detail size refers to line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.

3. The detail size is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.