Installation Report
DVIA-M Series
12-27-2023
Tier-1 Semiconductor ZEISS Xradia 620 Versa DVIA-MB3000 (231005R2) Installation Report — 2023.12.27
DVIA-M Series
Installation Report
Tier-1 Semiconductor
ZEISS
Xradia 620 Versa
DVIA-MB3000
231005R2
Contents
Overview
공압식 액티브 제진대 DVIA-MB3000가 설치 후 정상 성능으로 작동 합니다.
08:50~13:30 지속적으로 진동 측정하고 가장 높은 진동 레벨 기준으로 작성하였음.
Vibration Isolation System Information
Model: DVIA-MB3000
Serial Number: 231005R2
Engineer
Jongwon Park from DAEIL SYSTEMS
Tuning Date
December 27, 2023
Report written date
23.12.27
Date of business trip
17.12.27~17.12.29
Location
Tier-1 Semiconductor Hwaseong site, DSR A Tower, Product Technical Analysis Laboratory, B1
Equipment
ZEISS Xradia 620 Versa X-ray Microscope
Summary of Vibration Results
| Measurement Point | Z-axis (Vertical) 1–10 Hz | Z-axis (Vertical) 12.5–80 Hz | X-axis (Left to Right) 1–10 Hz | X-axis (Left to Right) 12.5–80 Hz | Y-axis (Front to Back) 1–10 Hz | Y-axis (Front to Back) 12.5–80 Hz |
|---|---|---|---|---|---|---|
| Floor — Operating Theatre | A | B | C | C | D | |
| Active | F | F | G | F | F | F |
Data and Image
Z-axis (Vertical) Floor VC curves
Z-axis (Vertical) Active VC curves
X-axis (Left to Right) Floor VC curves
X-axis (Left to Right) Active VC curves
Y-axis (Front to Back) Floor VC curves
Y-axis (Front to Back) Active VC curves
Supporting reference diagram
VC Curve Criteria
When comparing the two forms on a velocity basis, VC-Curve VC-A is 50 um/s, while Modified Mercalli intensity scale intensity 1 is 300 um/s, so intensity 1 vibration velocity is much larger.
Intensity 1 vibration is similar to Office (ISO) class 400 um/s, which is higher than VC-Curve VC-A.
Reference
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date12-27-2023
Tags
DVIA-M Series
Installation Report
Tier-1 Semiconductor
ZEISS
Xradia 620 Versa
DVIA-MB3000
231005R2
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