Tier-1 Semiconductor ZEISS Xradia 620 Versa DVIA-MB3000 (201201R2 P18) Installation Worksheet — 2021.03.31

DVIA-M Series

Installation Report

Tier-1 Semiconductor

ZEISS

Xradia 620 Versa

DVIA-MB3000

201201R2

B&K PULSE

Target equipment

zeiss xradia 620 versa

Place of installation

Tier-1 Semiconductor facility (Ansan), 1st floor general laboratory

Remark

Good Performance

End user

Tier-1 Semiconductor

Operator

Kim, DooHyun

Date of setup

21.03.31

Date of reporting

21.04.01

Date of business trip

17.12.27~17.12.29

Vibration isolation system information

Model: DVIA-MB3000

Serial number: 201201R2 (P18)

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

21.03.31 (WED)

Daeil System, Research engineer Kim, DooHyun

Place of measurement

Tier-1 Semiconductor facility (Ansan), 1st floor general laboratory

Equipment Model

zeiss xradia 620 versa

Measurement conditions and results

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

Measurement conditions and results - Figure 1

Measurement conditions and results - Figure 2

Measurement conditions and results - Figure 3

Summary of measurement results

Test condition	Z (VC-Class)	X (VC-Class)	Y (VC-Class)
Floor	D	F	E
Above Active	D	D	D

The target equipment exhibits a peak noise component at 52.5 Hz (e.g., DC‑fan-related vibration). Considering the target equipment vibration behavior, the overall condition is satisfactory. The target equipment vibration requirement is VC‑D, satisfied on all three axes.