LG InnoTek ZEISS Xradia 620 Versa DVIA-MB3000 (201201R2) Installation Report — 2026.02.09
Contents
Overview
Tuning and vibration measurements were conducted on DVIA-MB3000 relocated to LG InnoTek Gumi Plant 4, factory building southwest side, 1st floor X-ray CT Room.
With customer equipment Turned on/IDLE, tuning and vibration measurements were performed.
The measured data were converted into VC curves, and reference material on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-MB3000
Serial Number: 201201R2
Engineer
Lee Chae-won, Field Engineer, DAEIL SYSTEMS
Inspection Date
9 February 2026
Report Written Date
2026.02.09
Installation Site
LG InnoTek Gumi Plant 4, factory building southwest side, 1st floor X-ray CT Room
End User
LG InnoTek
Customer Equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Xradia 620 Versa
Equipment Specification
Equipment Status
장비 설치 및 Turned On/IDLE
Vibration Measuring Instruments
10.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration Measurement Setup
F Span: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Conclusion
All directions satisfy the vibration specification.
In all directions, at higher frequencies there are intervals where vibration on DVIA-MB3000 is higher than floor vibration. This is vibration generated by Xradia 620 Versa.
Measurement Data
| Measurement site | Direction | Vibration specification | Floor (measured) | DVIA-MB3000 (measured) | Floor (result) | Platform (result) |
|---|---|---|---|---|---|---|
| LG이노텍 구미 4공장 X-ray CT Room 1. 바닥진동 2. DVIA-MB3000 | Vertical | VC-C | VC-B @ 8 Hz | VC-F @ 8 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C | VC-D @ 6.3 Hz | VC-G @ 6.3 Hz | ✓ PASS | ✓ PASS | |
| Front to Back | VC-C | VC-E @ 8 Hz | VC-G @ 8 Hz | ✓ PASS | ✓ PASS |
Data & Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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