Tier-1 Semiconductor Hwaseong Bruker LA-02 DVIA-P4000 (039887B) Inspection Report — December 2023

Inspection was carried out following a request to inspect three DVIA-P units installed at the Tier-1 Semiconductor Hwaseong site.

Daeil UI Program Transmissibility review shows normal performance.

Vibration measurement results show that upper-plate vibration readings are high due to equipment IDLE-state vibration.

For accurate inspection, inspection and tuning with the equipment turned off are required.

23.12.18

17.12.27~17.12.29

Model: DVIA-P4000

Serial Number (SAC-07): 039887B

Youngha Lee from DAEIL SYSTEMS

December 14, 2023

Tier-1 Semiconductor NRD line 3F, Hwaseong

Bruker LA-02

Vibration measurement was performed with the upper equipment in IDLE state.

On the Z-axis, upper-plate vibration exceeds lower-plate vibration across all frequency bands due to equipment IDLE-state vibration.

On the X-axis, at 15 Hz and 35 Hz bands, upper-plate high-frequency vibration exceeds lower-plate values due to equipment IDLE-state vibration.

On the Y-axis, isolation performance is lower than on the X-axis; at 15 Hz and 35 Hz bands, upper-plate high-frequency vibration exceeds lower-plate values due to equipment IDLE-state vibration.

For accurate isolator performance evaluation, vibration measurement and tuning with the upper equipment turned off are required.

Accelerometer and displacement sensors correctly sense vibration changes and operate normally.

With floor excitation applied, Active Transmissibility measured via the Daeil UI Program shows attenuation of -10 dB or more from 3 Hz.

A resonance peak rising to -10 dB at 25 Hz exists but is not a performance concern.

Except for 50–60 Hz, upper-plate vibration exceeds lower-plate vibration across all bands; the UI Program indicates correct operation, so this is judged to be vibration from equipment IDLE state.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.

Active Transmissibility via the Daeil UI Program shows attenuation below -10 dB from 3 Hz.

Resonance peaks rising to 0 dB at 15 Hz and 27 Hz may be equipment IDLE vibration; horizontal-axis excitation is not possible, so that vibration cannot be judged.

For accurate evaluation, inspection with the upper equipment turned off is required; performance may improve with additional tuning.

Vibration attenuation appears excellent in the 1–8 Hz band.

In the 15 Hz and 25–35 Hz ranges, upper-plate vibration exceeds lower-plate vibration.

Resonance peaks also appear on the UI Program Transmissibility graph; this is judged to be vibration from equipment IDLE state.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.

Active Transmissibility via the Daeil UI Program shows attenuation of -10 dB or more from 3 Hz.

Performance below -10 dB in the 7–12 Hz band; tuning is required for performance improvement.

Resonance peaks rising to 0 dB at 15 Hz, 32 Hz, and 72 Hz may be equipment IDLE vibration; horizontal-axis excitation is not possible, so that vibration cannot be judged.

For accurate evaluation, inspection with the upper equipment turned off is required; performance may improve with additional tuning.

Except near 3 Hz, attenuation occurs in the 1–8 Hz band but at a lower level than on the X-axis; performance can be improved through tuning.

At 3 Hz, 15 Hz, and 25–35 Hz, upper-plate vibration exceeds lower-plate vibration.

Resonance peaks also appear on the UI Program Transmissibility graph; this is judged to be vibration from equipment IDLE state.

For accurate isolator performance evaluation, vibration measurement with the upper equipment turned off is required.