Tier-1 Semiconductor Hwaseong Bruker AFM NM-4 DVIA-P4000 (036174) Inspection Report — December 2023
Contents
Overview
Inspection was carried out following a request to inspect three VAAV-4000H units installed at the Tier-1 Semiconductor Hwaseong site.
Vibration measurement results show that in the 1–40 Hz band the upper plate vibration exceeds the lower plate vibration.
Displacement sensors operate normally, but there is a problem with the output values; visual inspection after stopping air supply still shows a gap between the unit upper and lower plates, so detailed inspection is required.
Report written date
23.12.18
Date of business trip
17.12.27~17.12.29
System Information
Model: VAAV-4000H
Serial Number (SAC-07): 036174
Engineer
Youngha Lee from DAEIL SYSTEMS
Inspection Date
December 14, 2023
Location
Tier-1 Semiconductor NRD line 8F, Hwaseong
Equipment
Bruker AFM NM-4
Summary of Vibration Results
| Measurement Point | Z-axis (Vertical) 1-10 Hz | Z-axis (Vertical) 12.5-80 Hz | X-axis (Left to Right) 1-10 Hz | X-axis (Left to Right) 12.5-80 Hz | Y-axis (Front to Back) 1-10 Hz | Y-axis (Front to Back) 12.5-80 Hz |
|---|---|---|---|---|---|---|
| Floor | C | C | C | D | C | D |
| Active | C | B | C | C | C | B |
Measurement was performed with the equipment in IDLE state.
Vibration measurement results show that on all axes, in the 1–40 Hz band, upper-plate vibration is greater than lower-plate vibration.
Per the UI program, equipment vibration is difficult to distinguish.
Cause analysis and resolution through inspection are required.
Data and Image
Displacement Sensor Graph
Vertical-axis displacement sensors read 4.29 mm, 4.29 mm, and 4.73 mm (high values).
Horizontal-axis displacement sensors read 0.1 mm–0.2 mm (incorrect values).
Accelerometer Graph
Z-axis (Vertical) Transmissibility
Z-axis (Vertical) VC curves
X-axis (Left to Right) Transmissibility
X-axis (Left to Right) VC curves
Y-axis (Front to Back) Transmissibility
Y-axis (Front to Back) VC curves
Air Regulator Photo
Confirmed normal supply from the Tier-1 Semiconductor side supply regulator.
Daeil isolator regulator
Confirmed normal operation of the Daeil isolator regulator.
Unit Photo
Confirmed that the unit top and bottom plates remain separated even with air supply off (inspection required).
Photo taken with Float, POS, and FF functions all off.
Unit 写真1 (Unit number unknown)
Unit 写真 2 (Unit 3)
Unit 写真 3 (Unit number unknown)
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