Tier-1 Semiconductor Advanced Institute EVG 6200 Aligner DVIA-P2200 Inspection Report

Operation status inspection and vibration measurement of the DVIA-P2200.

Inspection and vibration measurement were performed with the equipment in IDLE state. (Equipment vibration typically occurs in the 10–30 Hz band.)

The pad X-axis face contacts the grating, which degrades performance in the 5–10 Hz band.

Z and Y axes show correct operation when reviewed with the DAEIL SYSTEMS program Transmissibility graph.

Model: DVIA-P2200

Serial Number: 140416R6-6

Serial Number (SAC-07): 022604

Youngha Lee, Jongwon Park from DAEIL SYSTEMS

December 12, 2023

SAIT Cleanroom Building A, Suwon

Aligner EVG 6200

Inspection was performed with the upper equipment in IDLE state.

When equipment is IDLE, vibration often appears in the 10–30 Hz band or higher; such vibration may be measured on the top plate.

Due to pad contact with the grating, top-plate vibration in the X-axis low-frequency band was measured larger than the bottom plate.

For accurate isolator inspection and tuning, the upper equipment should be fully turned off.

8.1) PULSE 22

Hardware: Bruel & Kjaer Type 3050-A-040

Software: LapShop Application (PULSE Lapshop)

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Accelerometer and displacement sensors sense vibration changes correctly and operate normally.

The DVIA-P resonance peak in the passive transmissibility graph is correctly below 10 Hz.

Multiple resonance peaks above 12 Hz, 16 Hz, and 20 Hz are attributed to equipment IDLE vibration.

In the active transmissibility graph, transmissibility near 0 dB in the 2–7 Hz band indicates reduced performance without amplification; multiple resonance peaks above 16 Hz and 20 Hz are attributed to equipment IDLE vibration.

In other bands, transmissibility is −10 dB or lower, indicating proper isolation.

The DVIA-P resonance peak in the passive transmissibility graph is near 10 Hz.

The asymmetric transmissibility shape suggests utility structure or equipment influence; the peak near 26 Hz is attributed to equipment IDLE vibration.

In the active transmissibility graph, transmissibility near 0 dB between 10–20 Hz suggests the structure may be constrained by utility or other coupling; the peak near 26 Hz is attributed to equipment IDLE vibration.

In other bands, transmissibility is −10 dB or lower, indicating proper isolation.

The DVIA-P resonance peak in the passive transmissibility graph is near 10 Hz.

The blunt transmissibility shape below 10 dB suggests utility structure or equipment influence; the peak near 37 Hz is attributed to equipment IDLE vibration.

In the active transmissibility graph, transmissibility below −10 dB near 10 Hz suggests possible utility or structural coupling; the peak near 37 Hz is attributed to equipment IDLE vibration.

In other bands, transmissibility is −10 dB or lower, indicating proper isolation.

In the low-frequency band, vibration is at or below VC-F; proportional response yields lower attenuation.

Between 10–50 Hz, top-plate vibration exceeds the bottom plate; compared with the DAEIL UI program transmissibility graph, this is attributed to upper equipment IDLE vibration.

In the low-frequency band, vibration is at or below VC-F; proportional response yields lower attenuation.

Between 5–10 Hz, top-plate vibration exceeds the bottom plate; because other axes isolate normally, X-axis installation structure or upper equipment IDLE vibration is suspected (grating contact issue).

Comparison before/after removing the grating with the upper equipment turned off, plus tuning, is required.

In the 1–4 Hz low-frequency band, vibration is at or below VC-G; proportional response yields lower attenuation.

Between 30–50 Hz, upper equipment IDLE vibration inverts or reduces top-plate vibration relative to the bottom plate.

The pad X-axis face contacts the grating while equipment is installed, affecting X-axis isolation performance; structural review is required.