Installation Report
DVIA-M Series
12-06-2023
GRGT Helios G5 CX DualBeam DVIA-M1000 (230818R1-1) Installation Report
DVIA-M Series
Installation Report
GRGT
DVIA-M1000
230818R1-1
Thermo Fisher Scientific
Helios G5 CX
DualBeam
FIB-SEM
Wuxi
Contents
GRGT
GRGT
(M1000_ 230818R1-1 Set up)
Site checklist
| Target equipment | Helios G5 CX DualBeam |
|---|---|
| Place of installation | Wuxi |
| Remark | Good Performance |
| END USER | GRGT |
Operator and dates
Operator: Park, Jongwon
Date of setup: 23.11.29
Date of reporting: 23.12.06
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.11.29 (Wednesday)
Operator: DAEIL SYSTEMS Jongwon Park
Place of measurement: Wuxi
Equipment Model: Thermo Fisher Scientific FIB-SEM Helios G5 CX DualBeam
5.
M1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date12-06-2023
Tags
DVIA-M Series
Installation Report
GRGT
DVIA-M1000
230818R1-1
Thermo Fisher Scientific
Helios G5 CX
DualBeam
FIB-SEM
Wuxi
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