Installation Report

DVIA-M Series

08-07-2024

GRGT Shanghai Thermo Fisher Helios G5 CX DVIA-M1000 Internal Program Measurement

DVIA-M Series

Installation Report

DVIA-M1000

Thermo Fisher Scientific

Helios G5 CX

GRGT

Shanghai

GRGT

(M1000_ 221107R1 Set up)

Target equipment	Thermo Fisher Helios G5 CX
Place of installation	Shanghai
Remark	Good Performance
END USER	GRGT

Operator: Chaewon Lee

Date of setup: 24.07.25

Date of reporting: 24.08.07

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date

2024.07.25 (Thursday)

Operator

Chaewon Lee from DAEIL SYSTEMS

Place of measurement

Shanghai

Equipment Model

Manufacturer: Thermo Fisher Scientific

Equipment: FIB-SEM

Model: Helios G5 CX

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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GRGT Shanghai Thermo Fisher Helios G5 CX DVIA-M1000 Internal Program Measurement

GRGT

Contents

Overview

Measurement date

Operator

Place of measurement

Equipment Model

M1000 internal program performance measurement result

Vertical

Left to Right

Front to Back

Reference

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Case Study Information

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