Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
Tier-1 Semiconductor Hwaseong NRD Line ZEISS AIMS 1x DVIA-P4000 (220804R2) Inspection Report
DVIA-P4000 (S/N 220804R2) inspection at Tier-1 Semiconductor Hwaseong NRD Line 3F with ZEISS AIMS 1x equipment — open-loop tests, feedback and feedforward transmissibility, VC curves (equipment off/on), and comparison with September 2022 baseline data.

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report
DVIA-MB1000 installation report (serial 230704R3) for GeminiSEM 560 at POSCO FUTURE M 음극재 site. Summary-of-vibration table lists VC-class cells for Floor versus Active across Z/X/Y curves; embedded plots are floor and active VC curves per axis plus an equipment photograph. Decorative header/logo raster beneath the Word address block is omitted from publication. Reference follows the repo standard Generic Vibration Criteria markdown table (embedded reference raster not republished). The second Y-axis figure follows the Floor plot in Word but was captioned incorrectly twice as Floor; publication labels it Active VC curves to align with Z/X structure.

Thermo Fisher Scientific Apreo 2S HiVac DVIA-M1000 Installation Report
GRGT / Shanghai — Apreo 2S HiVac on DVIA-M1000 (230905R2). M1000 internal program measurement (full view and Z/X/Y plots).

TUSUR, Tomsk Emcraft Veritas 3100 DVIA-MB1000 Installation Report — 2023.10.27
DVIA-MB1000 (SN 220825R6-3) under Emcraft Veritas 3100 for TUSUR, Tomsk, Russia — engineer itinerary, onsite tuning window, Z/X/Y transmissibility plots (no standalone equipment photograph in source).

Guangdong Jiashang Solaris GMH DVIA-M1000 (230809R2) Installation Report
DVIA-M1000 abbreviated worksheet (serial 230809R2). Setup dated 23.11.02 and reporting dated 23.11.03; measurement date 2023.11.02 (Thursday) in Dongguan with operator Jongwon Park from DAEIL SYSTEMS. END USER Guangdong Jiashang New Energy Tech Co., Ltd.; target equipment Solaris GMH and installation site Dongguan as in the form. The Overview block states the standard DVIA-M1000 sentence only. No vibration specification, equipment status, tuning request, measurement summary table, or Reference section appears in the source. The internal-program section title in the source reads “M1000 internal program performance measurement result”; published figures are three plots labeled Z axis, X axis, and Y axis. Decorative header graphics from the Word file are omitted from public copy.

Huawei Solaris GMH DVIA-M1000 Installation Report (230509R6-2)
Huawei-end Solaris GMH site (Shanghai): DVIA-M1000 serial 230509R6-2 setup — internal program performance screenshots for Z, X, and Y axes.